반전법 기반의 2축 직선 이송계의 직각도 오차 측정 기법

A new technique based on the reversal method, is suggested to measure squareness error of the two-linear axes system. The technique uses the L-type steel bar, a capacitive sensor, and three experimental installations required to measure squareness error and two horizontal straightness errors. Profile and squareness of the L-type steel bar are estimated, by using the principle of the reversal method. Also, setup errors inevitable at installation, are separated from measured data using the least square method. Multi-DOF errors of two-linear axes system are measured and analyzed, using the suggested technique. Also, the reference mirror with flatness of 30 nm is used to verify the suggested measurement technique. Difference between the two measurement methods is 3.25 arcsec, a value within measurement repeatability.