1.55-μm bottom-emitting InAIGaAs VCSELs with Al2O 3/a-Si thin-film pairs as a top mirror

Hyun Woo Song, Won Seok Han, Jong Hee Kim, O. Kyun Kwon, Young Gu Ju, Jong Hyun Lee, Sang Hee Kopark, Seung Goo Kang

Research output: Contribution to journalConference articlepeer-review

Abstract

A 1.55 μm InAlGaAs/InP vertical cavity surface emitting lasers (VCSEL) with a high quality Al2O3/a-Si mirror using single-step metallorganic chemical vapor deposition (MOCVD) were investigated. Thermally favorable InP layers were positioned on both sides of thin active region to spread the generated heat effectively. Thin and highly doped tunnel junction layers of C-doped InAlAs and Si-doped InP were located at field intensity node to minimize optical loss. Fabricated VCSEL having the aperture diameter of about 10 μm shows the maximum output power of 0.44 mW in continuous-wave mode at room temperature.

Original languageEnglish
Pages (from-to)410-411
Number of pages2
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume1
StatePublished - 2004
Event2004 IEEE LEOS Annual Meeting Conference Proceedings, LEOS 2004 - Rio Grande, Puerto Rico
Duration: 7 Nov 200411 Nov 2004

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