200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules

C. Wang; S. W. Nam; J. M. Cotte; H. Peng; C. V. Jahnes; D. Wang; R. Bruce; M. Guillorn; L. M. Gignac; W. H. Advocate; C. M. Breslin; M. Brink; J. Bucchignano; E. A. Duch; A. Galan; E. Kratschmer; P. J. Litwinowicz; M. F. Lofaro; W. Price; S. M. Rossnagel; R. D. Goldblatt; E. A. Joseph; D. Pfeiffer; S. Papa Rao; A. Royyuru; G. A. Stolovitzky; E. G. Colgan; Q. Lin; S. Polonsky

doi:10.1109/IEDM.2013.6724627

200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules

C. Wang, S. W. Nam, J. M. Cotte, H. Peng, C. V. Jahnes, D. Wang, R. Bruce, M. Guillorn, L. M. Gignac, W. H. Advocate, C. M. Breslin, M. Brink, J. Bucchignano, E. A. Duch, A. Galan, E. Kratschmer, P. J. Litwinowicz, M. F. Lofaro, W. Price, S. M. RossnagelR. D. Goldblatt, E. A. Joseph, D. Pfeiffer, S. Papa Rao, A. Royyuru, G. A. Stolovitzky, E. G. Colgan, Q. Lin, S. Polonsky

Department of Medicine

IBM

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

We report sub-20 nm sacrificial nanochannels that enable stretching and translocating single DNA molecules. Sacrificial silicon nano-structures were etched with XeF₂ to form nanochannels. Translocations of linearized DNA single molecules were imaged by fluorescence microscopy. Our method offers a manufacturable wafer-scale approach for CMOS-compatible bio-chip platform.

Original language	English
Title of host publication	2013 IEEE International Electron Devices Meeting, IEDM 2013
Pages	14.1.1-14.1.4
DOIs	https://doi.org/10.1109/IEDM.2013.6724627
State	Published - 2013
Event	2013 IEEE International Electron Devices Meeting, IEDM 2013 - Washington, DC, United States Duration: 9 Dec 2013 → 11 Dec 2013

Publication series

Name	Technical Digest - International Electron Devices Meeting, IEDM
ISSN (Print)	0163-1918

Conference

Conference	2013 IEEE International Electron Devices Meeting, IEDM 2013
Country/Territory	United States
City	Washington, DC
Period	9/12/13 → 11/12/13

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10.1109/IEDM.2013.6724627

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Wang, C., Nam, S. W., Cotte, J. M., Peng, H., Jahnes, C. V., Wang, D., Bruce, R., Guillorn, M., Gignac, L. M., Advocate, W. H., Breslin, C. M., Brink, M., Bucchignano, J., Duch, E. A., Galan, A., Kratschmer, E., Litwinowicz, P. J., Lofaro, M. F., Price, W., ... Polonsky, S. (2013). 200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules. In 2013 IEEE International Electron Devices Meeting, IEDM 2013 (pp. 14.1.1-14.1.4). Article 6724627 (Technical Digest - International Electron Devices Meeting, IEDM). https://doi.org/10.1109/IEDM.2013.6724627

@inproceedings{1150e5f6a612461393d8ab1727c8c157,

title = "200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules",

abstract = "We report sub-20 nm sacrificial nanochannels that enable stretching and translocating single DNA molecules. Sacrificial silicon nano-structures were etched with XeF2 to form nanochannels. Translocations of linearized DNA single molecules were imaged by fluorescence microscopy. Our method offers a manufacturable wafer-scale approach for CMOS-compatible bio-chip platform.",

author = "C. Wang and Nam, {S. W.} and Cotte, {J. M.} and H. Peng and Jahnes, {C. V.} and D. Wang and R. Bruce and M. Guillorn and Gignac, {L. M.} and Advocate, {W. H.} and Breslin, {C. M.} and M. Brink and J. Bucchignano and Duch, {E. A.} and A. Galan and E. Kratschmer and Litwinowicz, {P. J.} and Lofaro, {M. F.} and W. Price and Rossnagel, {S. M.} and Goldblatt, {R. D.} and Joseph, {E. A.} and D. Pfeiffer and Rao, {S. Papa} and A. Royyuru and Stolovitzky, {G. A.} and Colgan, {E. G.} and Q. Lin and S. Polonsky",

year = "2013",

doi = "10.1109/IEDM.2013.6724627",

language = "English",

isbn = "9781479923076",

series = "Technical Digest - International Electron Devices Meeting, IEDM",

pages = "14.1.1--14.1.4",

booktitle = "2013 IEEE International Electron Devices Meeting, IEDM 2013",

note = "2013 IEEE International Electron Devices Meeting, IEDM 2013 ; Conference date: 09-12-2013 Through 11-12-2013",

}

Wang, C, Nam, SW, Cotte, JM, Peng, H, Jahnes, CV, Wang, D, Bruce, R, Guillorn, M, Gignac, LM, Advocate, WH, Breslin, CM, Brink, M, Bucchignano, J, Duch, EA, Galan, A, Kratschmer, E, Litwinowicz, PJ, Lofaro, MF, Price, W, Rossnagel, SM, Goldblatt, RD, Joseph, EA, Pfeiffer, D, Rao, SP, Royyuru, A, Stolovitzky, GA, Colgan, EG, Lin, Q & Polonsky, S 2013, 200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules. in 2013 IEEE International Electron Devices Meeting, IEDM 2013., 6724627, Technical Digest - International Electron Devices Meeting, IEDM, pp. 14.1.1-14.1.4, 2013 IEEE International Electron Devices Meeting, IEDM 2013, Washington, DC, United States, 9/12/13. https://doi.org/10.1109/IEDM.2013.6724627

200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules. / Wang, C.; Nam, S. W.; Cotte, J. M. et al.
2013 IEEE International Electron Devices Meeting, IEDM 2013. 2013. p. 14.1.1-14.1.4 6724627 (Technical Digest - International Electron Devices Meeting, IEDM).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - 200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules

AU - Wang, C.

AU - Nam, S. W.

AU - Cotte, J. M.

AU - Peng, H.

AU - Jahnes, C. V.

AU - Wang, D.

AU - Bruce, R.

AU - Guillorn, M.

AU - Gignac, L. M.

AU - Advocate, W. H.

AU - Breslin, C. M.

AU - Brink, M.

AU - Bucchignano, J.

AU - Duch, E. A.

AU - Galan, A.

AU - Kratschmer, E.

AU - Litwinowicz, P. J.

AU - Lofaro, M. F.

AU - Price, W.

AU - Rossnagel, S. M.

AU - Goldblatt, R. D.

AU - Joseph, E. A.

AU - Pfeiffer, D.

AU - Rao, S. Papa

AU - Royyuru, A.

AU - Stolovitzky, G. A.

AU - Colgan, E. G.

AU - Lin, Q.

AU - Polonsky, S.

PY - 2013

Y1 - 2013

N2 - We report sub-20 nm sacrificial nanochannels that enable stretching and translocating single DNA molecules. Sacrificial silicon nano-structures were etched with XeF2 to form nanochannels. Translocations of linearized DNA single molecules were imaged by fluorescence microscopy. Our method offers a manufacturable wafer-scale approach for CMOS-compatible bio-chip platform.

AB - We report sub-20 nm sacrificial nanochannels that enable stretching and translocating single DNA molecules. Sacrificial silicon nano-structures were etched with XeF2 to form nanochannels. Translocations of linearized DNA single molecules were imaged by fluorescence microscopy. Our method offers a manufacturable wafer-scale approach for CMOS-compatible bio-chip platform.

UR - http://www.scopus.com/inward/record.url?scp=84894378775&partnerID=8YFLogxK

U2 - 10.1109/IEDM.2013.6724627

DO - 10.1109/IEDM.2013.6724627

M3 - Conference contribution

AN - SCOPUS:84894378775

SN - 9781479923076

T3 - Technical Digest - International Electron Devices Meeting, IEDM

SP - 14.1.1-14.1.4

BT - 2013 IEEE International Electron Devices Meeting, IEDM 2013

T2 - 2013 IEEE International Electron Devices Meeting, IEDM 2013

Y2 - 9 December 2013 through 11 December 2013

ER -

Wang C, Nam SW, Cotte JM, Peng H, Jahnes CV, Wang D et al. 200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules. In 2013 IEEE International Electron Devices Meeting, IEDM 2013. 2013. p. 14.1.1-14.1.4. 6724627. (Technical Digest - International Electron Devices Meeting, IEDM). doi: 10.1109/IEDM.2013.6724627

200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules

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