200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules

C. Wang; S. W. Nam; J. M. Cotte; H. Peng; C. V. Jahnes; D. Wang; R. Bruce; M. Guillorn; L. M. Gignac; W. H. Advocate; C. M. Breslin; M. Brink; J. Bucchignano; E. A. Duch; A. Galan; E. Kratschmer; P. J. Litwinowicz; M. F. Lofaro; W. Price; S. M. Rossnagel; R. D. Goldblatt; E. A. Joseph; D. Pfeiffer; S. Papa Rao; A. Royyuru; G. A. Stolovitzky; E. G. Colgan; Q. Lin; S. Polonsky

doi:10.1109/IEDM.2013.6724627

200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules

C. Wang
, S. W. Nam
, J. M. Cotte
, H. Peng
, C. V. Jahnes
, D. Wang
, R. Bruce
, M. Guillorn
, L. M. Gignac
, W. H. Advocate
, C. M. Breslin
, M. Brink
, J. Bucchignano
, E. A. Duch
, A. Galan
, E. Kratschmer
, P. J. Litwinowicz
, M. F. Lofaro
, W. Price
, S. M. Rossnagel

R. D. Goldblatt, E. A. Joseph, D. Pfeiffer, S. Papa Rao, A. Royyuru, G. A. Stolovitzky, E. G. Colgan, Q. Lin, S. Polonsky

Department of Medicine

IBM

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

We report sub-20 nm sacrificial nanochannels that enable stretching and translocating single DNA molecules. Sacrificial silicon nano-structures were etched with XeF₂ to form nanochannels. Translocations of linearized DNA single molecules were imaged by fluorescence microscopy. Our method offers a manufacturable wafer-scale approach for CMOS-compatible bio-chip platform.

Original language	English
Title of host publication	2013 IEEE International Electron Devices Meeting, IEDM 2013
Pages	14.1.1-14.1.4
DOIs	https://doi.org/10.1109/IEDM.2013.6724627
State	Published - 2013
Event	2013 IEEE International Electron Devices Meeting, IEDM 2013 - Washington, DC, United States Duration: 9 Dec 2013 → 11 Dec 2013

Publication series

Name	Technical Digest - International Electron Devices Meeting, IEDM
ISSN (Print)	0163-1918

Conference

Conference	2013 IEEE International Electron Devices Meeting, IEDM 2013
Country/Territory	United States
City	Washington, DC
Period	9/12/13 → 11/12/13

Access to Document

10.1109/IEDM.2013.6724627

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Wang, C., Nam, S. W., Cotte, J. M., Peng, H., Jahnes, C. V., Wang, D., Bruce, R., Guillorn, M., Gignac, L. M., Advocate, W. H., Breslin, C. M., Brink, M., Bucchignano, J., Duch, E. A., Galan, A., Kratschmer, E., Litwinowicz, P. J., Lofaro, M. F., Price, W., ... Polonsky, S. (2013). 200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules. In 2013 IEEE International Electron Devices Meeting, IEDM 2013 (pp. 14.1.1-14.1.4). Article 6724627 (Technical Digest - International Electron Devices Meeting, IEDM). https://doi.org/10.1109/IEDM.2013.6724627

@inproceedings{1150e5f6a612461393d8ab1727c8c157,

title = "200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules",

abstract = "We report sub-20 nm sacrificial nanochannels that enable stretching and translocating single DNA molecules. Sacrificial silicon nano-structures were etched with XeF2 to form nanochannels. Translocations of linearized DNA single molecules were imaged by fluorescence microscopy. Our method offers a manufacturable wafer-scale approach for CMOS-compatible bio-chip platform.",

author = "C. Wang and Nam, \{S. W.\} and Cotte, \{J. M.\} and H. Peng and Jahnes, \{C. V.\} and D. Wang and R. Bruce and M. Guillorn and Gignac, \{L. M.\} and Advocate, \{W. H.\} and Breslin, \{C. M.\} and M. Brink and J. Bucchignano and Duch, \{E. A.\} and A. Galan and E. Kratschmer and Litwinowicz, \{P. J.\} and Lofaro, \{M. F.\} and W. Price and Rossnagel, \{S. M.\} and Goldblatt, \{R. D.\} and Joseph, \{E. A.\} and D. Pfeiffer and Rao, \{S. Papa\} and A. Royyuru and Stolovitzky, \{G. A.\} and Colgan, \{E. G.\} and Q. Lin and S. Polonsky",

year = "2013",

doi = "10.1109/IEDM.2013.6724627",

language = "English",

isbn = "9781479923076",

series = "Technical Digest - International Electron Devices Meeting, IEDM",

pages = "14.1.1--14.1.4",

booktitle = "2013 IEEE International Electron Devices Meeting, IEDM 2013",

note = "2013 IEEE International Electron Devices Meeting, IEDM 2013 ; Conference date: 09-12-2013 Through 11-12-2013",

}

Wang, C, Nam, SW, Cotte, JM, Peng, H, Jahnes, CV, Wang, D, Bruce, R, Guillorn, M, Gignac, LM, Advocate, WH, Breslin, CM, Brink, M, Bucchignano, J, Duch, EA, Galan, A, Kratschmer, E, Litwinowicz, PJ, Lofaro, MF, Price, W, Rossnagel, SM, Goldblatt, RD, Joseph, EA, Pfeiffer, D, Rao, SP, Royyuru, A, Stolovitzky, GA, Colgan, EG, Lin, Q & Polonsky, S 2013, 200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules. in 2013 IEEE International Electron Devices Meeting, IEDM 2013., 6724627, Technical Digest - International Electron Devices Meeting, IEDM, pp. 14.1.1-14.1.4, 2013 IEEE International Electron Devices Meeting, IEDM 2013, Washington, DC, United States, 9/12/13. https://doi.org/10.1109/IEDM.2013.6724627

200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules. / Wang, C.; Nam, S. W.; Cotte, J. M. et al.
2013 IEEE International Electron Devices Meeting, IEDM 2013. 2013. p. 14.1.1-14.1.4 6724627 (Technical Digest - International Electron Devices Meeting, IEDM).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - 200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules

AU - Wang, C.

AU - Nam, S. W.

AU - Cotte, J. M.

AU - Peng, H.

AU - Jahnes, C. V.

AU - Wang, D.

AU - Bruce, R.

AU - Guillorn, M.

AU - Gignac, L. M.

AU - Advocate, W. H.

AU - Breslin, C. M.

AU - Brink, M.

AU - Bucchignano, J.

AU - Duch, E. A.

AU - Galan, A.

AU - Kratschmer, E.

AU - Litwinowicz, P. J.

AU - Lofaro, M. F.

AU - Price, W.

AU - Rossnagel, S. M.

AU - Goldblatt, R. D.

AU - Joseph, E. A.

AU - Pfeiffer, D.

AU - Rao, S. Papa

AU - Royyuru, A.

AU - Stolovitzky, G. A.

AU - Colgan, E. G.

AU - Lin, Q.

AU - Polonsky, S.

PY - 2013

Y1 - 2013

N2 - We report sub-20 nm sacrificial nanochannels that enable stretching and translocating single DNA molecules. Sacrificial silicon nano-structures were etched with XeF2 to form nanochannels. Translocations of linearized DNA single molecules were imaged by fluorescence microscopy. Our method offers a manufacturable wafer-scale approach for CMOS-compatible bio-chip platform.

AB - We report sub-20 nm sacrificial nanochannels that enable stretching and translocating single DNA molecules. Sacrificial silicon nano-structures were etched with XeF2 to form nanochannels. Translocations of linearized DNA single molecules were imaged by fluorescence microscopy. Our method offers a manufacturable wafer-scale approach for CMOS-compatible bio-chip platform.

UR - https://www.scopus.com/pages/publications/84894378775

U2 - 10.1109/IEDM.2013.6724627

DO - 10.1109/IEDM.2013.6724627

M3 - Conference contribution

AN - SCOPUS:84894378775

SN - 9781479923076

T3 - Technical Digest - International Electron Devices Meeting, IEDM

SP - 14.1.1-14.1.4

BT - 2013 IEEE International Electron Devices Meeting, IEDM 2013

T2 - 2013 IEEE International Electron Devices Meeting, IEDM 2013

Y2 - 9 December 2013 through 11 December 2013

ER -

Wang C, Nam SW, Cotte JM, Peng H, Jahnes CV, Wang D et al. 200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules. In 2013 IEEE International Electron Devices Meeting, IEDM 2013. 2013. p. 14.1.1-14.1.4. 6724627. (Technical Digest - International Electron Devices Meeting, IEDM). doi: 10.1109/IEDM.2013.6724627

200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules

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