@inproceedings{476a0bab710d4ae6ace0447656e355c2,
title = "90 MHz nanomechanical structures fabricated by stencil deposition and dry etching",
abstract = "We present a simple method for fabricating fast resonating (90 MHz) nanomechanical elements based on the local deposition through a miniaturized shadow mask (nanostencil), followed by dry etching to release the structure from the substrate. The measured resonance frequency of a fabricated nanomechanical structure shows high resonance frequency up to 90 MHz. This resistless and dry process provides a flexible, rapid and stiction-free approach for the fabrication of ultra-fast resonating elements in various materials.",
keywords = "Atomic force microscopy, Dry etching, Fabrication, Lithography, Nanoelectromechanical systems, Nanoscale devices, Nanostructures, Resonance, Resonant frequency, Silicon compounds",
author = "Kim, {G. M.} and {Van Den Boogaart}, {M. A.F.} and S. Kawai and H. Kawakatsu and J. Brugger",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
year = "2003",
doi = "10.1109/SENSOR.2003.1215616",
language = "English",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "883--886",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
address = "United States",
}