A 2-axis Polydimethylsiloxane (PDMS) based electromagnetic MEMS scanning mirror for optical coherence tomography

Sehui Kim, Changho Lee, Jin Young Kim, Geunbae Lim, Jeehyun Kim, Chulhong Kim

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

Optical coherence tomography (OCT) is a noninvasive imaging tool for visualizing cross-sectional images of biological tissues on a microscale. Various microelectromechanical system (MEMS) techniques have been applied to OCT for endoscopic catheters and handheld probes. Despite having several advantages such as compact sizes and high speeds for real-time imaging, the complexities of the fabrication processes and relatively high costs were bottlenecks for fast clinical translation and commercialization of the earlier MEMS scanners. To overcome these issues, we developed a 2-axis polydimethylsiloxane (PDMS)-based electromagnetic MEMS scanning mirror based on flexible, cost-effective, and handleable PDMS. The size of this MEMS scanner was 15 × 15 × 15 mm3. To realize the characteristics of the scanner, we obtained the DC/AC responses and scanning patterns. The measured maximum scanning angles were 16.6° and 11.6° along the X and Y axes, respectively. The resonance frequencies were 82 and 57 Hz along the X and Y axes, respectively. The scanning patterns (raster and Lissajous scan patterns) are also demonstrated by controlling the frequency and amplitude. Finally, we showed the in vivo 2D-OCT images of human fingers by using a spectral domain OCT system with a PDMSbased MEMS scanning mirror. We then reconstructed the 3D images of human fingers. The obtained field of view was 8 × 8 mm2. The PDMS-based MEMS scanning mirror has the potential to combine other optical modalities and be widely used in preclinical and clinical translation research.

Original languageEnglish
Title of host publicationAdvanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XIV
EditorsAnita Mahadevan-Jansen, Tuan Vo-Dinh, Warren S. Grundfest
PublisherSPIE
ISBN (Electronic)9781628419320
DOIs
StatePublished - 2016
EventAdvanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XIV - San Francisco, United States
Duration: 14 Feb 201616 Feb 2016

Publication series

NameProgress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume9698
ISSN (Print)1605-7422

Conference

ConferenceAdvanced Biomedical and Clinical Diagnostic and Surgical Guidance Systems XIV
Country/TerritoryUnited States
CitySan Francisco
Period14/02/1616/02/16

Keywords

  • MEMS scanning mirror
  • Optical coherence tomography
  • Polydimethylsiloxane (PDMS)

Fingerprint

Dive into the research topics of 'A 2-axis Polydimethylsiloxane (PDMS) based electromagnetic MEMS scanning mirror for optical coherence tomography'. Together they form a unique fingerprint.

Cite this