A CMOS Microelectrode Array System with Reconfigurable Sub-Array Multiplexing Architecture Integrating 24,320 Electrodes and 380 Readout Channels

Ji Hyoung Cha, Jee Ho Park, Yongjae Park, Hyogeun Shin, Kyeong Seob Hwang, Il Joo Cho, Seong Jin Kim

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

This article presents a CMOS microelectrode array (MEA) system with a reconfigurable sub-array multiplexing architecture using the time-division multiplexing (TDM) technique. The system consists of 24,320 TiN electrodes with 17.7 μm-pitch pixels and 380 column-parallel readout channels including a low-noise amplifier, a programmable gain amplifier, and a 10-b successive approximation register analog to digital converter. Readout channels are placed outside the pixel for high spatial resolution, and a flexible structure to acquire neural signals from electrodes selected by configuring in-pixel memory is realized. In this structure, a single channel can handle 8 to 32 electrodes, guaranteeing a temporal resolution from 5 kS/s to 20 kS/s for each electrode. A 128 × 190 MEA system was fabricated in a 110-nm CMOS process, and each readout channel consumes 81 μW at 1.5-V supply voltage featuring input-referred noise of 1.48 μVrms without multiplexing and 5.4 μVrms with multiplexing at the action-potential band (300 Hz-10 kHz).

Original languageEnglish
Pages (from-to)1044-1056
Number of pages13
JournalIEEE Transactions on Biomedical Circuits and Systems
Volume16
Issue number6
DOIs
StatePublished - 1 Dec 2022

Keywords

  • CMOS microelectrode array
  • column-parallel readout channel
  • in-pixel memory
  • neural recording
  • reconfigurable sub-array multiplexing
  • spatiotemporal resolution
  • time-division multiplexing

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