@inproceedings{7ec2576b65bd43d79f1dcb336dfa12c2,
title = "A dual-axis tilt sensor using electrolyte",
abstract = "An electrolyte-based dual-axis tilt sensor has been newly designed, fabricated using micro electro mechanical systems (MEMS) technique and reported in this paper. For tilt detection on two axes, four sensing electrodes have been formed on the four sidewalls of the truncated pyramid cavity and a common electrode at the bottom of the cavity for contacting the electrolyte through a via-hall. The measured characteristic of the tilt sensor demonstrates approximately 50 mV of change in the output voltage per degree of inclination angle in ±70° of operating angle range on two axes.",
keywords = "electrolyte, inclinometer, tilt sensor",
author = "Choi, \{Ju Chan\} and Choi, \{Young Chan\} and Lee, \{June Kyoo\} and Kim, \{Hak Rin\} and Kong, \{Seong Ho\}",
year = "2012",
doi = "10.1063/1.4751569",
language = "English",
isbn = "9780735410855",
series = "AIP Conference Proceedings",
pages = "74--78",
booktitle = "2nd International Advances in Applied Physics and Materials Science Congress",
note = "2nd International Advances in Applied Physics and Materials Science Congress, APMAS 2012 ; Conference date: 26-04-2012 Through 29-04-2012",
}