A high-resolution lensless fluorescence imaging system using membrane deflection for reducing gap between samples and image sensor

Hyogeun Shin, Woongsun Choi, Gun Wook Yoon, Suyoung Seo, Nakwon Choi, Jun Bo Yoon, Il Joo Cho

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper reports on a high-resolution lensless fluorescence imaging system using membrane deflection for reducing the gap between fluorescent samples and a CMOS image sensor array. The presented system applied the principle of the total internal reflection of excitation light inside a PDMS chip to minimize the exposure of excitation light to the image sensor. We integrated a very thin (5.5 μm) PDMS membrane as a flexible deflector, which allowed for significant reduction of the gap (∼20 μm) inevitably created during the conventional packaging (i.e., wire bonding) of image sensors. In the fabricated system, we achieved minimum distance of 7.5 μm between fluorescent samples and an image sensor array. This reduced gap almost directly corresponds to a resolution as high as ∼7.5 μm, based on the point spread function (PSF).

Original languageEnglish
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages419-421
Number of pages3
ISBN (Electronic)9781538647820
DOIs
StatePublished - 24 Apr 2018
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
Duration: 21 Jan 201825 Jan 2018

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2018-January
ISSN (Print)1084-6999

Conference

Conference31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/TerritoryUnited Kingdom
CityBelfast
Period21/01/1825/01/18

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