TY - GEN
T1 - A high-speed whitelight scanning interferometer using On-The-Fly imaging and parallel processing
AU - Ko, Kuk Won
AU - Sim, Jae Hwan
AU - Kim, Min Young
PY - 2012
Y1 - 2012
N2 - White light scanning interferometer is one of effective optical measurement systems for high-precision industries. However, its major disadvantages are the slow image-capturing speed for the interferogram acquisition and the high computational cost for the peak-detecting signal process. Here, first a new image acquiring method to reduce the image capturing time is proposed, which is called 'On-The-Fly imaging system'. During a vertical scanning motion of whitelight scanning interferometer, 2D images of interference fringe are sequentially acquired at a series of given vertical positions without conventional stepwise motions. Second, to reduce the calculation time, a parallel computing method to link multiple PCs is proposed. These two methods were implemented for high-speed WSI and evaluated for on-line inspection to Semiconductor manufacturing process.
AB - White light scanning interferometer is one of effective optical measurement systems for high-precision industries. However, its major disadvantages are the slow image-capturing speed for the interferogram acquisition and the high computational cost for the peak-detecting signal process. Here, first a new image acquiring method to reduce the image capturing time is proposed, which is called 'On-The-Fly imaging system'. During a vertical scanning motion of whitelight scanning interferometer, 2D images of interference fringe are sequentially acquired at a series of given vertical positions without conventional stepwise motions. Second, to reduce the calculation time, a parallel computing method to link multiple PCs is proposed. These two methods were implemented for high-speed WSI and evaluated for on-line inspection to Semiconductor manufacturing process.
KW - On-the-fly imaging system
KW - Parrallel computing system
KW - Semicoudct Inspection
KW - Whitelight Scanning Interometer
UR - http://www.scopus.com/inward/record.url?scp=84873529313&partnerID=8YFLogxK
U2 - 10.1109/ISOT.2012.6403243
DO - 10.1109/ISOT.2012.6403243
M3 - Conference contribution
AN - SCOPUS:84873529313
SN - 9781467328777
T3 - 2012 International Symposium on Optomechatronic Technologies, ISOT 2012
BT - 2012 International Symposium on Optomechatronic Technologies, ISOT 2012
T2 - 2012 International Symposium on Optomechatronic Technologies, ISOT 2012
Y2 - 29 October 2012 through 31 October 2012
ER -