@inproceedings{0a153660230a412780d230143711cc93,
title = "A MEMS-based dual-axis tilt sensor using air medium",
abstract = "In this paper, a MEMS-based dual-axis tilt sensor, which utilizes a free-convection-based air medium, is fabricated and its operating characteristics are evaluated. The key components of the proposed tilt sensor, microheater and temperature sensors, are designed to have various patterns in order to examine an optimized geometry for achieving high sensitivity. Six different types of tilt sensors are fabricated and measured. The proposed tilt sensor operates in a wide detecting range of ±90° on two axes. Output characteristics show excellent linearity and symmetric sensitivity. Fabrication sequence is also very simple owing to its monotonous structure and heater/sensor material, thus it fits mass production at a low cost.",
keywords = "Air medium, Convection, Inclinometer, MEMS, Tilt sensor",
author = "Choi, \{J. C.\} and Park, \{C. M.\} and Lee, \{J. K.\} and Kong, \{S. H.\}",
year = "2009",
doi = "10.1109/SENSOR.2009.5285505",
language = "English",
isbn = "9781424441938",
series = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",
pages = "300--303",
booktitle = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",
note = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems ; Conference date: 21-06-2009 Through 25-06-2009",
}