A Method for Diagnosing the Process Chamber Prior to Plasma Processes
- Seong Jin Kim
- , Heechul Jung
- , Hyo Won Lee
- , Seongju Lim
- , Ji Hoon Lee
- , Jong Won Yu
- , Jaehyun Kim
- , Sang Won Lee
- Korea Advanced Institute of Science and Technology
- Inc
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
2
Scopus
citations