A microsensor array with porous tin oxide thin films and microhotplate dangled by wires in air

Dae Sik Lee; Chang Hyun Shim; Jun Woo Lim; Jeung Soo Huh; Duk Dong Lee; Youn Tae Kim

doi:10.1016/S0925-4005(01)01057-7

A microsensor array with porous tin oxide thin films and microhotplate dangled by wires in air

Dae Sik Lee, Chang Hyun Shim, Jun Woo Lim, Jeung Soo Huh, Duk Dong Lee, Youn Tae Kim

Research output: Contribution to journal › Conference article › peer-review

19 Scopus citations

Abstract

A microsensor array with the highly sensitive porous tin oxide thin films employing the noble metal catalysts of Pt and Au on a new microhotplate, dangled in air by Pt bonding wires, has been designed and fabricated. The microhot plate was made of N/O/N Si diaphragm with area of 1.9 mm × 2.1 mm. Power consumption was reduced by decreasing the thickness of substrate. The sensor array was applied to recognizing the explosive gases within the range of threshold limit values (TLVs), employing principal component analysis. The result showed that the micro sensor array was qualified for classifying obviously the kinds and quantities of the explosive gases.

Original language	English
Pages (from-to)	250-255
Number of pages	6
Journal	Sensors and Actuators, B: Chemical
Volume	83
Issue number	1-3
DOIs	https://doi.org/10.1016/S0925-4005(01)01057-7
State	Published - 15 Mar 2002
Event	Selected papers from Transduckers '01 Eurosensors XV (Transduckers 2001) - Munich, Germany Duration: 10 Jun 2001 → 14 Jun 2001

Keywords

Explosive gases
Microgas sensor
Microhotplate
Tin oxide

Access to Document

10.1016/S0925-4005(01)01057-7

Cite this

@article{529c012777ef4131b13a15ec103fcfe1,

title = "A microsensor array with porous tin oxide thin films and microhotplate dangled by wires in air",

abstract = "A microsensor array with the highly sensitive porous tin oxide thin films employing the noble metal catalysts of Pt and Au on a new microhotplate, dangled in air by Pt bonding wires, has been designed and fabricated. The microhot plate was made of N/O/N Si diaphragm with area of 1.9 mm × 2.1 mm. Power consumption was reduced by decreasing the thickness of substrate. The sensor array was applied to recognizing the explosive gases within the range of threshold limit values (TLVs), employing principal component analysis. The result showed that the micro sensor array was qualified for classifying obviously the kinds and quantities of the explosive gases.",

keywords = "Explosive gases, Microgas sensor, Microhotplate, Tin oxide",

author = "Lee, {Dae Sik} and Shim, {Chang Hyun} and Lim, {Jun Woo} and Huh, {Jeung Soo} and Lee, {Duk Dong} and Kim, {Youn Tae}",

year = "2002",

month = mar,

day = "15",

doi = "10.1016/S0925-4005(01)01057-7",

language = "English",

volume = "83",

pages = "250--255",

journal = "Sensors and Actuators, B: Chemical",

issn = "0925-4005",

publisher = "Elsevier B.V.",

number = "1-3",

note = "Selected papers from Transduckers '01 Eurosensors XV (Transduckers 2001) ; Conference date: 10-06-2001 Through 14-06-2001",

}

TY - JOUR

T1 - A microsensor array with porous tin oxide thin films and microhotplate dangled by wires in air

AU - Lee, Dae Sik

AU - Shim, Chang Hyun

AU - Lim, Jun Woo

AU - Huh, Jeung Soo

AU - Lee, Duk Dong

AU - Kim, Youn Tae

PY - 2002/3/15

Y1 - 2002/3/15

N2 - A microsensor array with the highly sensitive porous tin oxide thin films employing the noble metal catalysts of Pt and Au on a new microhotplate, dangled in air by Pt bonding wires, has been designed and fabricated. The microhot plate was made of N/O/N Si diaphragm with area of 1.9 mm × 2.1 mm. Power consumption was reduced by decreasing the thickness of substrate. The sensor array was applied to recognizing the explosive gases within the range of threshold limit values (TLVs), employing principal component analysis. The result showed that the micro sensor array was qualified for classifying obviously the kinds and quantities of the explosive gases.

AB - A microsensor array with the highly sensitive porous tin oxide thin films employing the noble metal catalysts of Pt and Au on a new microhotplate, dangled in air by Pt bonding wires, has been designed and fabricated. The microhot plate was made of N/O/N Si diaphragm with area of 1.9 mm × 2.1 mm. Power consumption was reduced by decreasing the thickness of substrate. The sensor array was applied to recognizing the explosive gases within the range of threshold limit values (TLVs), employing principal component analysis. The result showed that the micro sensor array was qualified for classifying obviously the kinds and quantities of the explosive gases.

KW - Explosive gases

KW - Microgas sensor

KW - Microhotplate

KW - Tin oxide

UR - http://www.scopus.com/inward/record.url?scp=0037088619&partnerID=8YFLogxK

U2 - 10.1016/S0925-4005(01)01057-7

DO - 10.1016/S0925-4005(01)01057-7

M3 - Conference article

AN - SCOPUS:0037088619

SN - 0925-4005

VL - 83

SP - 250

EP - 255

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

IS - 1-3

T2 - Selected papers from Transduckers '01 Eurosensors XV (Transduckers 2001)

Y2 - 10 June 2001 through 14 June 2001

ER -

A microsensor array with porous tin oxide thin films and microhotplate dangled by wires in air

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this