TY - GEN
T1 - A novel PDMS/parylene microvalve with three dimentional dome petal shape
AU - Oh, Jonghyun
AU - Kim, Gyuman
AU - Noh, Hongseok
PY - 2010
Y1 - 2010
N2 - We present a novel microvalve for the treatment of a pathological condition, hydrocephalus. This microvalve is made of PDMS/Parylene composite layer which has a 3-D dome petal shape. This geometry enables the microvalve to open easily for forward flows and to close for backward flows. New microfabrication techniques such as domeshaped SU-8 mold fabrication and laser machining for valve opening have been investigated to build the proposed microvalve. The pressure-drop vs. flow rate characteristic of the fabricated microvalve was investigated using in-vitro flow tests.
AB - We present a novel microvalve for the treatment of a pathological condition, hydrocephalus. This microvalve is made of PDMS/Parylene composite layer which has a 3-D dome petal shape. This geometry enables the microvalve to open easily for forward flows and to close for backward flows. New microfabrication techniques such as domeshaped SU-8 mold fabrication and laser machining for valve opening have been investigated to build the proposed microvalve. The pressure-drop vs. flow rate characteristic of the fabricated microvalve was investigated using in-vitro flow tests.
UR - http://www.scopus.com/inward/record.url?scp=77952769886&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2010.5442396
DO - 10.1109/MEMSYS.2010.5442396
M3 - Conference contribution
AN - SCOPUS:77952769886
SN - 9781424457649
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 1075
EP - 1078
BT - MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Y2 - 24 January 2010 through 28 January 2010
ER -