A novel PDMS/parylene microvalve with three dimentional dome petal shape

Jonghyun Oh, Gyuman Kim, Hongseok Noh

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

We present a novel microvalve for the treatment of a pathological condition, hydrocephalus. This microvalve is made of PDMS/Parylene composite layer which has a 3-D dome petal shape. This geometry enables the microvalve to open easily for forward flows and to close for backward flows. New microfabrication techniques such as domeshaped SU-8 mold fabrication and laser machining for valve opening have been investigated to build the proposed microvalve. The pressure-drop vs. flow rate characteristic of the fabricated microvalve was investigated using in-vitro flow tests.

Original languageEnglish
Title of host publicationMEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages1075-1078
Number of pages4
DOIs
StatePublished - 2010
Event23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China
Duration: 24 Jan 201028 Jan 2010

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Country/TerritoryChina
CityHong Kong
Period24/01/1028/01/10

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