TY - GEN
T1 - A planar, integrated total internal reflection sensor for biofouling detection
AU - Nam, K. H.
AU - Choi, W.
AU - Yeo, J.
AU - Ko, S. H.
AU - Lin, Liwei
N1 - Publisher Copyright:
© 2010TRF.
PY - 2010
Y1 - 2010
N2 - A planar, integrated total internal reflection (TIR) sensor for the characterizations of biofouling has been demonstrated based on angular interrogation of Fraunhofer diffraction. This sensor is made of a two-mask process to have optical prism and built-in waveguides of 4×0.25μm2 in cross section area. The core and cladding layer of the waveguide are made of silicon nitride and silicon dioxide, respectively and a 780nm in wavelength light source is used in the experiments. Water, ethanol, acetone and glycerol, have all been tested to illustrate the basic refractive index sensing principle of the prototype sensor. Biofouling measurements show that after been immersed into milk as the testing liquid, the surface refractive index of a prototype TIR sensor shifted continuously to as much as 0.0089 for a 9-hour test. As such, this technique could be useful to various biofouling control and monitoring applications, including water desalination, medical, marine and electronic device industries.
AB - A planar, integrated total internal reflection (TIR) sensor for the characterizations of biofouling has been demonstrated based on angular interrogation of Fraunhofer diffraction. This sensor is made of a two-mask process to have optical prism and built-in waveguides of 4×0.25μm2 in cross section area. The core and cladding layer of the waveguide are made of silicon nitride and silicon dioxide, respectively and a 780nm in wavelength light source is used in the experiments. Water, ethanol, acetone and glycerol, have all been tested to illustrate the basic refractive index sensing principle of the prototype sensor. Biofouling measurements show that after been immersed into milk as the testing liquid, the surface refractive index of a prototype TIR sensor shifted continuously to as much as 0.0089 for a 9-hour test. As such, this technique could be useful to various biofouling control and monitoring applications, including water desalination, medical, marine and electronic device industries.
UR - http://www.scopus.com/inward/record.url?scp=85061785824&partnerID=8YFLogxK
U2 - 10.31438/trf.hh2010.95
DO - 10.31438/trf.hh2010.95
M3 - Conference contribution
AN - SCOPUS:85061785824
T3 - Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop
SP - 356
EP - 359
BT - 2010 Solid-State Sensors, Actuators, and Microsystems Workshop
A2 - Monk, David J.
A2 - Turner, Kimberly L.
PB - Transducer Research Foundation
T2 - 2010 Solid-State Sensors, Actuators, and Microsystems Workshop
Y2 - 6 June 2010 through 10 June 2010
ER -
