A planar, integrated total internal reflection sensor for biofouling detection

K. H. Nam; W. Choi; J. Yeo; S. H. Ko; Liwei Lin

doi:10.31438/trf.hh2010.95

A planar, integrated total internal reflection sensor for biofouling detection

K. H. Nam
, W. Choi
, J. Yeo
, S. H. Ko
, Liwei Lin

University of California at Berkeley
Ewha Womans University
LG Corporation
Korea Advanced Institute of Science and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A planar, integrated total internal reflection (TIR) sensor for the characterizations of biofouling has been demonstrated based on angular interrogation of Fraunhofer diffraction. This sensor is made of a two-mask process to have optical prism and built-in waveguides of 4×0.25μm² in cross section area. The core and cladding layer of the waveguide are made of silicon nitride and silicon dioxide, respectively and a 780nm in wavelength light source is used in the experiments. Water, ethanol, acetone and glycerol, have all been tested to illustrate the basic refractive index sensing principle of the prototype sensor. Biofouling measurements show that after been immersed into milk as the testing liquid, the surface refractive index of a prototype TIR sensor shifted continuously to as much as 0.0089 for a 9-hour test. As such, this technique could be useful to various biofouling control and monitoring applications, including water desalination, medical, marine and electronic device industries.

Original language	English
Title of host publication	2010 Solid-State Sensors, Actuators, and Microsystems Workshop
Editors	David J. Monk, Kimberly L. Turner
Publisher	Transducer Research Foundation
Pages	356-359
Number of pages	4
ISBN (Electronic)	0964002485, 9780964002487
DOIs	https://doi.org/10.31438/trf.hh2010.95
State	Published - 2010
Event	2010 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States Duration: 6 Jun 2010 → 10 Jun 2010

Publication series

Name	Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference	2010 Solid-State Sensors, Actuators, and Microsystems Workshop
Country/Territory	United States
City	Hilton Head Island
Period	6/06/10 → 10/06/10

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 14 Life Below Water

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10.31438/trf.hh2010.95

Cite this

Nam, K. H., Choi, W., Yeo, J., Ko, S. H., & Lin, L. (2010). A planar, integrated total internal reflection sensor for biofouling detection. In D. J. Monk, & K. L. Turner (Eds.), 2010 Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 356-359). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2010.95

@inproceedings{a0b7755b2ef045588cfa4175e90aea5b,

title = "A planar, integrated total internal reflection sensor for biofouling detection",

abstract = "A planar, integrated total internal reflection (TIR) sensor for the characterizations of biofouling has been demonstrated based on angular interrogation of Fraunhofer diffraction. This sensor is made of a two-mask process to have optical prism and built-in waveguides of 4×0.25μm2 in cross section area. The core and cladding layer of the waveguide are made of silicon nitride and silicon dioxide, respectively and a 780nm in wavelength light source is used in the experiments. Water, ethanol, acetone and glycerol, have all been tested to illustrate the basic refractive index sensing principle of the prototype sensor. Biofouling measurements show that after been immersed into milk as the testing liquid, the surface refractive index of a prototype TIR sensor shifted continuously to as much as 0.0089 for a 9-hour test. As such, this technique could be useful to various biofouling control and monitoring applications, including water desalination, medical, marine and electronic device industries.",

author = "Nam, \{K. H.\} and W. Choi and J. Yeo and Ko, \{S. H.\} and Liwei Lin",

note = "Publisher Copyright: {\textcopyright} 2010TRF.; 2010 Solid-State Sensors, Actuators, and Microsystems Workshop ; Conference date: 06-06-2010 Through 10-06-2010",

year = "2010",

doi = "10.31438/trf.hh2010.95",

language = "English",

series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",

publisher = "Transducer Research Foundation",

pages = "356--359",

editor = "Monk, \{David J.\} and Turner, \{Kimberly L.\}",

booktitle = "2010 Solid-State Sensors, Actuators, and Microsystems Workshop",

}

Nam, KH, Choi, W, Yeo, J, Ko, SH & Lin, L 2010, A planar, integrated total internal reflection sensor for biofouling detection. in DJ Monk & KL Turner (eds), 2010 Solid-State Sensors, Actuators, and Microsystems Workshop. Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop, Transducer Research Foundation, pp. 356-359, 2010 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, United States, 6/06/10. https://doi.org/10.31438/trf.hh2010.95

A planar, integrated total internal reflection sensor for biofouling detection. / Nam, K. H.; Choi, W.; Yeo, J. et al.
2010 Solid-State Sensors, Actuators, and Microsystems Workshop. ed. / David J. Monk; Kimberly L. Turner. Transducer Research Foundation, 2010. p. 356-359 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A planar, integrated total internal reflection sensor for biofouling detection

AU - Nam, K. H.

AU - Choi, W.

AU - Yeo, J.

AU - Ko, S. H.

AU - Lin, Liwei

PY - 2010

Y1 - 2010

N2 - A planar, integrated total internal reflection (TIR) sensor for the characterizations of biofouling has been demonstrated based on angular interrogation of Fraunhofer diffraction. This sensor is made of a two-mask process to have optical prism and built-in waveguides of 4×0.25μm2 in cross section area. The core and cladding layer of the waveguide are made of silicon nitride and silicon dioxide, respectively and a 780nm in wavelength light source is used in the experiments. Water, ethanol, acetone and glycerol, have all been tested to illustrate the basic refractive index sensing principle of the prototype sensor. Biofouling measurements show that after been immersed into milk as the testing liquid, the surface refractive index of a prototype TIR sensor shifted continuously to as much as 0.0089 for a 9-hour test. As such, this technique could be useful to various biofouling control and monitoring applications, including water desalination, medical, marine and electronic device industries.

AB - A planar, integrated total internal reflection (TIR) sensor for the characterizations of biofouling has been demonstrated based on angular interrogation of Fraunhofer diffraction. This sensor is made of a two-mask process to have optical prism and built-in waveguides of 4×0.25μm2 in cross section area. The core and cladding layer of the waveguide are made of silicon nitride and silicon dioxide, respectively and a 780nm in wavelength light source is used in the experiments. Water, ethanol, acetone and glycerol, have all been tested to illustrate the basic refractive index sensing principle of the prototype sensor. Biofouling measurements show that after been immersed into milk as the testing liquid, the surface refractive index of a prototype TIR sensor shifted continuously to as much as 0.0089 for a 9-hour test. As such, this technique could be useful to various biofouling control and monitoring applications, including water desalination, medical, marine and electronic device industries.

UR - https://www.scopus.com/pages/publications/85061785824

U2 - 10.31438/trf.hh2010.95

DO - 10.31438/trf.hh2010.95

M3 - Conference contribution

AN - SCOPUS:85061785824

T3 - Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

SP - 356

EP - 359

BT - 2010 Solid-State Sensors, Actuators, and Microsystems Workshop

A2 - Monk, David J.

A2 - Turner, Kimberly L.

PB - Transducer Research Foundation

T2 - 2010 Solid-State Sensors, Actuators, and Microsystems Workshop

Y2 - 6 June 2010 through 10 June 2010

ER -

Nam KH, Choi W, Yeo J, Ko SH, Lin L. A planar, integrated total internal reflection sensor for biofouling detection. In Monk DJ, Turner KL, editors, 2010 Solid-State Sensors, Actuators, and Microsystems Workshop. Transducer Research Foundation. 2010. p. 356-359. (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). doi: 10.31438/trf.hh2010.95

A planar, integrated total internal reflection sensor for biofouling detection

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UN SDGs

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