A sensitivity approach to force calculation in electrostatic MEMS devices

Min Li; Dong Hun Kim; David A. Lowther; Jan K. Sykulski

doi:10.1109/TMAG.2007.916380

A sensitivity approach to force calculation in electrostatic MEMS devices

Min Li, Dong Hun Kim, David A. Lowther, Jan K. Sykulski

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

This paper presents a novel method for the computation of force in an electrostatically operated microelectromechanical systems (MEMS) device. The approach is based on continuum design sensitivity analysis (CDSA) and can be used with any analysis system. The method, unlike that of Maxwell stresses, does not require an airgap surrounding the body. The method is applied to the calculation of the tilt angle of a MEMS micromirror, and numerical results are compared with experimental measurements on the real device.

Original language	English
Article number	4526937
Pages (from-to)	1610-1613
Number of pages	4
Journal	IEEE Transactions on Magnetics
Volume	44
Issue number	6
DOIs	https://doi.org/10.1109/TMAG.2007.916380
State	Published - Jun 2008

Keywords

Continuum design sensitivity analysis (CDSA)
Force calculation
Microelectromechanical system (MEMS) devices

Access to Document

10.1109/TMAG.2007.916380

Cite this

@article{b8e65531e61a4120ab1a966818e046b8,

title = "A sensitivity approach to force calculation in electrostatic MEMS devices",

abstract = "This paper presents a novel method for the computation of force in an electrostatically operated microelectromechanical systems (MEMS) device. The approach is based on continuum design sensitivity analysis (CDSA) and can be used with any analysis system. The method, unlike that of Maxwell stresses, does not require an airgap surrounding the body. The method is applied to the calculation of the tilt angle of a MEMS micromirror, and numerical results are compared with experimental measurements on the real device.",

keywords = "Continuum design sensitivity analysis (CDSA), Force calculation, Microelectromechanical system (MEMS) devices",

author = "Min Li and Kim, {Dong Hun} and Lowther, {David A.} and Sykulski, {Jan K.}",

year = "2008",

month = jun,

doi = "10.1109/TMAG.2007.916380",

language = "English",

volume = "44",

pages = "1610--1613",

journal = "IEEE Transactions on Magnetics",

issn = "0018-9464",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "6",

}

TY - JOUR

T1 - A sensitivity approach to force calculation in electrostatic MEMS devices

AU - Li, Min

AU - Kim, Dong Hun

AU - Lowther, David A.

AU - Sykulski, Jan K.

PY - 2008/6

Y1 - 2008/6

N2 - This paper presents a novel method for the computation of force in an electrostatically operated microelectromechanical systems (MEMS) device. The approach is based on continuum design sensitivity analysis (CDSA) and can be used with any analysis system. The method, unlike that of Maxwell stresses, does not require an airgap surrounding the body. The method is applied to the calculation of the tilt angle of a MEMS micromirror, and numerical results are compared with experimental measurements on the real device.

AB - This paper presents a novel method for the computation of force in an electrostatically operated microelectromechanical systems (MEMS) device. The approach is based on continuum design sensitivity analysis (CDSA) and can be used with any analysis system. The method, unlike that of Maxwell stresses, does not require an airgap surrounding the body. The method is applied to the calculation of the tilt angle of a MEMS micromirror, and numerical results are compared with experimental measurements on the real device.

KW - Continuum design sensitivity analysis (CDSA)

KW - Force calculation

KW - Microelectromechanical system (MEMS) devices

UR - http://www.scopus.com/inward/record.url?scp=44049105934&partnerID=8YFLogxK

U2 - 10.1109/TMAG.2007.916380

DO - 10.1109/TMAG.2007.916380

M3 - Article

AN - SCOPUS:44049105934

SN - 0018-9464

VL - 44

SP - 1610

EP - 1613

JO - IEEE Transactions on Magnetics

JF - IEEE Transactions on Magnetics

IS - 6

M1 - 4526937

ER -

A sensitivity approach to force calculation in electrostatic MEMS devices

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this