TY - JOUR
T1 - Accuracy improvement of miniaturized machine tool
T2 - Geometric error modeling and compensation
AU - Lee, Jae Ha
AU - Liu, Yu
AU - Yang, Seung Han
PY - 2006/10
Y1 - 2006/10
N2 - A novel capacitance-sensor based multi-degree-of-freedom (DOF) measurement system has been developed for measuring geometric errors of a miniaturized machine tool (mMT) overcoming the size limitations. In the present work five geometric error components of a three-axis mMT are measured simultaneously along each axis and the squareness errors are determined by the slopes of straightness error profiles. Least-squares fitting method is used to represent the analytical models of geometric errors. A kinematic chain consisting of various structural members of mMT is introduced to establish the positional relationships among its coordinate frames. Based on this kinematic chain a general volumetric error model has been developed to synthesize all geometric error components of a miniaturized machine tool. Then, a recursive compensation method is proposed to achieve error compensation efficiently. Test results show that the positioning accuracy of miniaturized machine tool has been improved with compensation.
AB - A novel capacitance-sensor based multi-degree-of-freedom (DOF) measurement system has been developed for measuring geometric errors of a miniaturized machine tool (mMT) overcoming the size limitations. In the present work five geometric error components of a three-axis mMT are measured simultaneously along each axis and the squareness errors are determined by the slopes of straightness error profiles. Least-squares fitting method is used to represent the analytical models of geometric errors. A kinematic chain consisting of various structural members of mMT is introduced to establish the positional relationships among its coordinate frames. Based on this kinematic chain a general volumetric error model has been developed to synthesize all geometric error components of a miniaturized machine tool. Then, a recursive compensation method is proposed to achieve error compensation efficiently. Test results show that the positioning accuracy of miniaturized machine tool has been improved with compensation.
KW - Error modeling
KW - Miniaturized machine tool
KW - Multi-DOF measurement
KW - Recursive compensation
KW - Volumetric error model synthesis
UR - http://www.scopus.com/inward/record.url?scp=33746335361&partnerID=8YFLogxK
U2 - 10.1016/j.ijmachtools.2005.09.004
DO - 10.1016/j.ijmachtools.2005.09.004
M3 - Article
AN - SCOPUS:33746335361
SN - 0890-6955
VL - 46
SP - 1508
EP - 1516
JO - International Journal of Machine Tools and Manufacture
JF - International Journal of Machine Tools and Manufacture
IS - 12-13
ER -