Abstract
A novel capacitance-sensor based multi-degree-of-freedom (DOF) measurement system has been developed for measuring geometric errors of a miniaturized machine tool (mMT) overcoming the size limitations. In the present work five geometric error components of a three-axis mMT are measured simultaneously along each axis and the squareness errors are determined by the slopes of straightness error profiles. Least-squares fitting method is used to represent the analytical models of geometric errors. A kinematic chain consisting of various structural members of mMT is introduced to establish the positional relationships among its coordinate frames. Based on this kinematic chain a general volumetric error model has been developed to synthesize all geometric error components of a miniaturized machine tool. Then, a recursive compensation method is proposed to achieve error compensation efficiently. Test results show that the positioning accuracy of miniaturized machine tool has been improved with compensation.
| Original language | English |
|---|---|
| Pages (from-to) | 1508-1516 |
| Number of pages | 9 |
| Journal | International Journal of Machine Tools and Manufacture |
| Volume | 46 |
| Issue number | 12-13 |
| DOIs | |
| State | Published - Oct 2006 |
Keywords
- Error modeling
- Miniaturized machine tool
- Multi-DOF measurement
- Recursive compensation
- Volumetric error model synthesis
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