Abstract
The initial adsorption mechanism of TiCl4 on H/Si(1 0 0)-2 × 1 surface was theoretically studied. The direct chlorination channel turned out to be kinetically the most favorable on H/Si(1 0 0)-2 × 1 surface, contrasting to the corresponding reactions on OH/Si(1 0 0)-2 × 1. Consequently, it would increase the surface Cl/Ti ratio.
Original language | English |
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Pages (from-to) | 249-253 |
Number of pages | 5 |
Journal | Chemical Physics Letters |
Volume | 461 |
Issue number | 4-6 |
DOIs | |
State | Published - 20 Aug 2008 |