Adsorption of TiCl4 on H/Si(1 0 0)-2 × 1 Surface

Manik Kumer Ghosh, Cheol Ho Choi

Research output: Contribution to journalArticlepeer-review

14 Scopus citations

Abstract

The initial adsorption mechanism of TiCl4 on H/Si(1 0 0)-2 × 1 surface was theoretically studied. The direct chlorination channel turned out to be kinetically the most favorable on H/Si(1 0 0)-2 × 1 surface, contrasting to the corresponding reactions on OH/Si(1 0 0)-2 × 1. Consequently, it would increase the surface Cl/Ti ratio.

Original languageEnglish
Pages (from-to)249-253
Number of pages5
JournalChemical Physics Letters
Volume461
Issue number4-6
DOIs
StatePublished - 20 Aug 2008

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