An integrated Mach-Zehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition

Sung Joong Choo; Jinsik Kim; Kyung Woon Lee; Dong Ho Lee; Hyun Joon Shin; Jung Ho Park

doi:10.1016/j.cap.2014.04.016

An integrated Mach-Zehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition

Sung Joong Choo, Jinsik Kim, Kyung Woon Lee, Dong Ho Lee, Hyun Joon Shin, Jung Ho Park

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

We report the design and fabrication of an integrated Mach-Zehnder interferometric (MZI) biochip based on silicon oxynitride layers deposited with a plasma-enhanced chemical vapor deposition (PECVD) process. A rib waveguide for an integrated MZI sensor has been designed to have a high surface sensitivity and a single-mode behavior by using an effective index method. The integrated MZI chip operating at 637 nm is fabricated via conventional photolithography and reactive ion etching. As a biosensor application, the real-time and label-free detection of the covalent immobilization and hybridization of DNA strands is performed and verified with this device.

Original language	English
Pages (from-to)	954-959
Number of pages	6
Journal	Current Applied Physics
Volume	14
Issue number	7
DOIs	https://doi.org/10.1016/j.cap.2014.04.016
State	Published - Jul 2014

Keywords

DNA
Integrated Mach-Zehnder interferometric biochip
Plasma-enhanced chemical vapor deposition
Silicon oxynitride layers

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10.1016/j.cap.2014.04.016

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title = "An integrated Mach-Zehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition",

abstract = "We report the design and fabrication of an integrated Mach-Zehnder interferometric (MZI) biochip based on silicon oxynitride layers deposited with a plasma-enhanced chemical vapor deposition (PECVD) process. A rib waveguide for an integrated MZI sensor has been designed to have a high surface sensitivity and a single-mode behavior by using an effective index method. The integrated MZI chip operating at 637 nm is fabricated via conventional photolithography and reactive ion etching. As a biosensor application, the real-time and label-free detection of the covalent immobilization and hybridization of DNA strands is performed and verified with this device.",

keywords = "DNA, Integrated Mach-Zehnder interferometric biochip, Plasma-enhanced chemical vapor deposition, Silicon oxynitride layers",

author = "Choo, {Sung Joong} and Jinsik Kim and Lee, {Kyung Woon} and Lee, {Dong Ho} and Shin, {Hyun Joon} and Park, {Jung Ho}",

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AU - Choo, Sung Joong

AU - Kim, Jinsik

AU - Lee, Kyung Woon

AU - Lee, Dong Ho

AU - Shin, Hyun Joon

AU - Park, Jung Ho

PY - 2014/7

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N2 - We report the design and fabrication of an integrated Mach-Zehnder interferometric (MZI) biochip based on silicon oxynitride layers deposited with a plasma-enhanced chemical vapor deposition (PECVD) process. A rib waveguide for an integrated MZI sensor has been designed to have a high surface sensitivity and a single-mode behavior by using an effective index method. The integrated MZI chip operating at 637 nm is fabricated via conventional photolithography and reactive ion etching. As a biosensor application, the real-time and label-free detection of the covalent immobilization and hybridization of DNA strands is performed and verified with this device.

AB - We report the design and fabrication of an integrated Mach-Zehnder interferometric (MZI) biochip based on silicon oxynitride layers deposited with a plasma-enhanced chemical vapor deposition (PECVD) process. A rib waveguide for an integrated MZI sensor has been designed to have a high surface sensitivity and a single-mode behavior by using an effective index method. The integrated MZI chip operating at 637 nm is fabricated via conventional photolithography and reactive ion etching. As a biosensor application, the real-time and label-free detection of the covalent immobilization and hybridization of DNA strands is performed and verified with this device.

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KW - Integrated Mach-Zehnder interferometric biochip

KW - Plasma-enhanced chemical vapor deposition

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An integrated Mach-Zehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition

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