@inproceedings{bc19c04b3e1941b59ea1d1cd4b2ce0f8,
title = "An Iterative Actuator Calibration Method for Accurate N-Bucket Phase-Shifting in Phase Measuring Profilometry: Experiments",
abstract = "A new calibration method of micro actuators used for N-bucket phase-shifting in phase measuring profilometry has been developed to overcome the errors introduced by nonlinear, irregular, or unknown phase-step increments of actuators. First an evaluation measure of fringe displacement error is proposed to detect and evaluate the phase-shifting of the interference fringe induced by stepwise movements of actuator. Second an iterative calibration method is proposed, which is based on the regulation control theory. For the evaluation and verification of the proposed simple calibration method comparing with conventional complex ones, a series of simulations and experiments is performed in various conditions, and the results are discussed in detail.",
keywords = "interative error minimization, Phase measuring profilometry, phase-error index, Phase-shift moire interferometer, PZT calibration",
author = "Hong, {Deok Hwa} and Kim, {Min Young}",
note = "Publisher Copyright: {\textcopyright} 2014 IEEE.; 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 ; Conference date: 05-11-2014 Through 07-11-2014",
year = "2014",
doi = "10.1109/ISOT.2014.19",
language = "English",
series = "2014 International Symposium on Optomechatronic Technologies, ISOT 2014",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "42--46",
booktitle = "2014 International Symposium on Optomechatronic Technologies, ISOT 2014",
address = "United States",
}