An iterative actuator calibration method for accurate phase-shifting in N-bucket phase-shift interferometry

Deok Hwa Hong, Min Young Kim

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

A new calibration method of phase-shifting actuators for N-bucket phase-shift interferometry has been developed to overcome the errors introduced by nonlinear, irregular, or unknown phase-step increments of actuators. First an evaluation measure of fringe displacement error is proposed to detect and evaluate the phase-shifting of the interference fringe induced by stepwise movements of actuator. Second an iterative calibration method is proposed, which is based on the regulation control theory. For the evaluation and verification of the proposed simple calibration method comparing with conventional complex ones, a series of simulations is performed in various conditions, and simulation results are discussed in detail.

Original languageEnglish
Title of host publication2012 International Symposium on Optomechatronic Technologies, ISOT 2012
DOIs
StatePublished - 2012
Event2012 International Symposium on Optomechatronic Technologies, ISOT 2012 - Paris, France
Duration: 29 Oct 201231 Oct 2012

Publication series

Name2012 International Symposium on Optomechatronic Technologies, ISOT 2012

Conference

Conference2012 International Symposium on Optomechatronic Technologies, ISOT 2012
Country/TerritoryFrance
CityParis
Period29/10/1231/10/12

Keywords

  • Interative error minimization
  • Phase-error index
  • Phase-shift moire interferometer
  • PZT calibration

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