TY - GEN
T1 - An iterative actuator calibration method for accurate phase-shifting in N-bucket phase-shift interferometry
AU - Hong, Deok Hwa
AU - Kim, Min Young
PY - 2012
Y1 - 2012
N2 - A new calibration method of phase-shifting actuators for N-bucket phase-shift interferometry has been developed to overcome the errors introduced by nonlinear, irregular, or unknown phase-step increments of actuators. First an evaluation measure of fringe displacement error is proposed to detect and evaluate the phase-shifting of the interference fringe induced by stepwise movements of actuator. Second an iterative calibration method is proposed, which is based on the regulation control theory. For the evaluation and verification of the proposed simple calibration method comparing with conventional complex ones, a series of simulations is performed in various conditions, and simulation results are discussed in detail.
AB - A new calibration method of phase-shifting actuators for N-bucket phase-shift interferometry has been developed to overcome the errors introduced by nonlinear, irregular, or unknown phase-step increments of actuators. First an evaluation measure of fringe displacement error is proposed to detect and evaluate the phase-shifting of the interference fringe induced by stepwise movements of actuator. Second an iterative calibration method is proposed, which is based on the regulation control theory. For the evaluation and verification of the proposed simple calibration method comparing with conventional complex ones, a series of simulations is performed in various conditions, and simulation results are discussed in detail.
KW - Interative error minimization
KW - Phase-error index
KW - Phase-shift moire interferometer
KW - PZT calibration
UR - http://www.scopus.com/inward/record.url?scp=84873528031&partnerID=8YFLogxK
U2 - 10.1109/ISOT.2012.6403246
DO - 10.1109/ISOT.2012.6403246
M3 - Conference contribution
AN - SCOPUS:84873528031
SN - 9781467328777
T3 - 2012 International Symposium on Optomechatronic Technologies, ISOT 2012
BT - 2012 International Symposium on Optomechatronic Technologies, ISOT 2012
T2 - 2012 International Symposium on Optomechatronic Technologies, ISOT 2012
Y2 - 29 October 2012 through 31 October 2012
ER -