Analysis of gate delay scaling in In_0.7Ga_0.3As- channel high electron mobility transistors

The intrinsic and the parasitic gate delay of In_0.7Ga _0.3-channel high electron mobility transistors (HEMTs) are analyzed. In this paper, we extract the intrinsic parameters of sub-100-nm gate pseudomorphic InGaAs channel HEMTs and estimate the intrinsic and parasitic gate delay. We discuss how the intrinsic and parasitic gate delay are affected by scaling of the gate length and we estimate the parasitic gate capacitance from this gate delay analysis. We also compare the result of the gate delay analysis with lattice-matched InGaAs-channel HEMTs to examine the effect of use of the pseudomorphic InGaAs channel in the gate delay.