Analysis of the superconducting characteristics of niobium thin films deposited by using a dc magnetron sputtering system

Joonyoung Choi; Jaehyun Lee; Chang Duk Kim; Younjung Jo; Jeonghun Kang; Sung Ho Bae; Jaehyeok Yang; Dabin Jeong

doi:10.3938/NPSM.68.284

Analysis of the superconducting characteristics of niobium thin films deposited by using a dc magnetron sputtering system

Joonyoung Choi, Jaehyun Lee, Chang Duk Kim, Younjung Jo, Jeonghun Kang, Sung Ho Bae, Jaehyeok Yang, Dabin Jeong

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

The superconducting characteristics of Nb thin films deposited by using a DC magnetron sputtering system are investigated as a function of the sputtering temperature. The crystallinities of Nb and NbO are analyzed using an X-ray diffractometer (XRD), and the surface characteristics are analyzed using a field-emission scanning electron microscope (FE-SEM) and an atomic force microscope (AFM). The superconducting characteristics of the fabricated Nb thin films are confirmed using measurements of the resistance as a function of the temperature. The Nb thin film grown at a sputtering temperature of 240^◦C exhibits the highest crystallinity of Nb and the lowest crystallinity of NbO. The superconducting transition temperature (Tc) of the optimized film is 8.34 K, which is close to Tc of bulk Nb, 9.25 K. Therefore, we confirm that NbO crystallinity caused by oxygen is the critical factor that inhibits the superconducting characteristics of the Nb thin films.

Original language	English
Pages (from-to)	284-289
Number of pages	6
Journal	New Physics: Sae Mulli
Volume	68
Issue number	3
DOIs	https://doi.org/10.3938/NPSM.68.284
State	Published - Mar 2018

Keywords

Deposition by sputtering
Superconducting films
Superconducting properties

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title = "Analysis of the superconducting characteristics of niobium thin films deposited by using a dc magnetron sputtering system",

abstract = "The superconducting characteristics of Nb thin films deposited by using a DC magnetron sputtering system are investigated as a function of the sputtering temperature. The crystallinities of Nb and NbO are analyzed using an X-ray diffractometer (XRD), and the surface characteristics are analyzed using a field-emission scanning electron microscope (FE-SEM) and an atomic force microscope (AFM). The superconducting characteristics of the fabricated Nb thin films are confirmed using measurements of the resistance as a function of the temperature. The Nb thin film grown at a sputtering temperature of 240◦C exhibits the highest crystallinity of Nb and the lowest crystallinity of NbO. The superconducting transition temperature (Tc) of the optimized film is 8.34 K, which is close to Tc of bulk Nb, 9.25 K. Therefore, we confirm that NbO crystallinity caused by oxygen is the critical factor that inhibits the superconducting characteristics of the Nb thin films.",

keywords = "Deposition by sputtering, Superconducting films, Superconducting properties",

author = "Joonyoung Choi and Jaehyun Lee and Kim, {Chang Duk} and Younjung Jo and Jeonghun Kang and Bae, {Sung Ho} and Jaehyeok Yang and Dabin Jeong",

year = "2018",

month = mar,

doi = "10.3938/NPSM.68.284",

language = "English",

volume = "68",

pages = "284--289",

journal = "New Physics: Sae Mulli",

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T1 - Analysis of the superconducting characteristics of niobium thin films deposited by using a dc magnetron sputtering system

AU - Choi, Joonyoung

AU - Lee, Jaehyun

AU - Kim, Chang Duk

AU - Jo, Younjung

AU - Kang, Jeonghun

AU - Bae, Sung Ho

AU - Yang, Jaehyeok

AU - Jeong, Dabin

PY - 2018/3

Y1 - 2018/3

N2 - The superconducting characteristics of Nb thin films deposited by using a DC magnetron sputtering system are investigated as a function of the sputtering temperature. The crystallinities of Nb and NbO are analyzed using an X-ray diffractometer (XRD), and the surface characteristics are analyzed using a field-emission scanning electron microscope (FE-SEM) and an atomic force microscope (AFM). The superconducting characteristics of the fabricated Nb thin films are confirmed using measurements of the resistance as a function of the temperature. The Nb thin film grown at a sputtering temperature of 240◦C exhibits the highest crystallinity of Nb and the lowest crystallinity of NbO. The superconducting transition temperature (Tc) of the optimized film is 8.34 K, which is close to Tc of bulk Nb, 9.25 K. Therefore, we confirm that NbO crystallinity caused by oxygen is the critical factor that inhibits the superconducting characteristics of the Nb thin films.

AB - The superconducting characteristics of Nb thin films deposited by using a DC magnetron sputtering system are investigated as a function of the sputtering temperature. The crystallinities of Nb and NbO are analyzed using an X-ray diffractometer (XRD), and the surface characteristics are analyzed using a field-emission scanning electron microscope (FE-SEM) and an atomic force microscope (AFM). The superconducting characteristics of the fabricated Nb thin films are confirmed using measurements of the resistance as a function of the temperature. The Nb thin film grown at a sputtering temperature of 240◦C exhibits the highest crystallinity of Nb and the lowest crystallinity of NbO. The superconducting transition temperature (Tc) of the optimized film is 8.34 K, which is close to Tc of bulk Nb, 9.25 K. Therefore, we confirm that NbO crystallinity caused by oxygen is the critical factor that inhibits the superconducting characteristics of the Nb thin films.

KW - Deposition by sputtering

KW - Superconducting films

KW - Superconducting properties

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DO - 10.3938/NPSM.68.284

M3 - Article

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JO - New Physics: Sae Mulli

JF - New Physics: Sae Mulli

IS - 3

ER -

Analysis of the superconducting characteristics of niobium thin films deposited by using a dc magnetron sputtering system

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