@inproceedings{712b5e255d844923b9f7bb084a62cf99,
title = "Annealing temperature dependence of contact resistance and stability for Ti/Al/Pt/Au ohmic contacts to bulk n-ZnO",
abstract = "Summary form only given. The authors report on the annealing temperature dependence of contact resistance and morphology for Ti/Al/Pt/Au contacts on high-quality, undoped (n∼1017 cm-3) bulk ZnO substrates. Two different surface cleaning procedures were employed, although it was found that in general the as-received surface produced the lowest specific contact resistances.",
keywords = "Annealing, Contact resistance, Gold, Ohmic contacts, Stability, Surface cleaning, Surface morphology, Surface resistance, Temperature dependence, Zinc oxide",
author = "K. Ip and Baik, {K. H.} and Heo, {Y. W.} and Norton, {D. P.} and Pearton, {S. J.} and LaRoche, {J. R.} and B. Luo and F. Ren and Zavada, {J. M.}",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 2003 International Symposium on Compound Semiconductors, ISCS 2003 ; Conference date: 25-08-2003 Through 27-08-2003",
year = "2003",
doi = "10.1109/ISCS.2003.1239937",
language = "English",
series = "IEEE International Symposium on Compound Semiconductors, Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "123--124",
booktitle = "2003 International Symposium on Compound Semiconductors, ISCS 2003",
address = "United States",
}