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Annealing temperature dependence of contact resistance and stablity for Ti/Al/Pt/Au ohmic contacts to bulk n-Zno

  • K. Ip
  • , K. H. Baik
  • , Y. W. Heo
  • , D. P. Norton
  • , S. J. Pearton
  • , J. R. LaRoche
  • , B. Luo
  • , F. Ren
  • , J. M. Zavada
  • University of Florida
  • United States Army Research Office

Research output: Contribution to journalArticlepeer-review

25 Scopus citations
Original languageEnglish
Pages (from-to)2378-2381
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number6
DOIs
StatePublished - 2003

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