@inproceedings{e0286fa388c14101808fec5e2ef6949d,
title = "Application of beam splitters and position sensing detectors to measure five-degree-of-freedom geometric errors with miniaturized linear motion stage",
abstract = "In this paper, a laser optical measurement system using beam splitters and position sensing detectors (PSDs) is introduced for measuring the geometric errors of miniaturized linear motion stage. This economical measurement system includes one laser diode, two beam splitters and three PSDs to measure five geometric errors of linear stage synchronously. Because mounting errors persist, outputs of PSD not only include geometric error of linear stage, but also include induced errors. To separate geometric errors from the outputs containing coupled information of errors, a mounting error elimination method is derived with respect to the configuration of our measurement system. An algorithm to compute the outputs of PSD to geometric errors is discussed in this paper briefly. This algorithm calculates new values consisting of geometric errors by subtracting mounting errors from the PSD outputs. Also, the offset between laser diode and PSDs and the mounting errors of beam splitters can be figured out for the adjustment of system.",
keywords = "Geometric error, Laser measurement, Miniaturized linear stage, Mounting errors, Position sensing detectors",
author = "Wei Wang and Kweon, {Sung Hwan} and Lee, {Jae Ha} and Yang, {Seung Han}",
year = "2006",
language = "English",
isbn = "0872638480",
series = "Transactions of the North American Manufacturing Research Institute of SME",
pages = "245--252",
booktitle = "Transactions of the North American Manufacturing Research Institute of SME 2006 - Papers Presented at NAMRC 34",
note = "34th North American Manufacturing Research Conference ; Conference date: 23-05-2006 Through 26-05-2006",
}