Atmospheric pressure plasma polymerization using double grounded electrodes with He/Ar mixture

Dong Ha Kim, Hyun Jin Kim, Choon Sang Park, Bhum Jae Shin, Jeong Hyun Seo, Heung Sik Tae

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14 Scopus citations

Abstract

In this study, we have proposed the double grounded atmospheric pressure plasma jet (2G-APPJ) device to individually control the plasmas in both fragmentation (or active) and recombination (or passive) regions with a mixture of He and Ar gases to deposit organic thin films on glass or Si substrates. Plasma polymerization of acetone has been successfully deposited using a highly energetic and high-density 2G-APPJ and confirmed by scanning electron microscopy (SEM). Plasma composition was measured by optical emission spectroscopy (OES). In addition to a large number of Ar and He spectra lines, we observed some spectra of C2 and CH species for fragmentation and N2 (second positive band) species for recombination. The experimental results confirm that the Ar gas is identified as a key factor for facilitating fragmentation of acetone, whereas the He gas helps the plume of plasma reach the substrate on the 2nd grounded electrode during the plasma polymerization process. The high quality plasma polymerized thin films and nanoparticles can be obtained by the proposed 2G-APPJ device using dual gases.

Original languageEnglish
Article number097137
JournalAIP Advances
Volume5
Issue number9
DOIs
StatePublished - 1 Sep 2015

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