Atomic force microscopy-based nano-lithography for nano-patterning: A molecular dynamic study

Engineering

• Atomic Force Microscopy 100%
• Nanopatterning 100%
• Lithography 100%
• Process Variable 100%
• Computer Simulation 50%
• Microelectromechanical System 50%
• Material Surface 50%
• Simulation Result 50%
• Surface Quality 50%
• Cutting Speed 50%
• Monocrystalline 50%
• Cutting Force 50%
• Chip Thickness 50%
• Crystal Orientation 50%
• Deformation Characteristic 50%

Material Science

• Nanopatterning 100%
• Lithography 100%
• Atomic Force Microscopy 100%
• Microelectromechanical System 50%
• Surface Property 50%
• Crystal Orientation 50%