Abstract
Characteristics of 0.2m depletion mode (D) and quasi-enhancement mode (QE) capless InAlAs/InGaAs p-HEMTs having a self-aligned gate (SAG) are reported. The QE SAG capless p-HEMT showed improved output conductance and sub-threshold characteristics owing to the increased gate-to-channel aspect ratio implemented by using a buried Pt technology. The maximum gm, I ON/IOFF, sub-threshold slope, fT, and f max of the QE SAG capless p-HEMT were 1.22S/mm, 2.11×10 5, 65mV/dec, 210GHz and 250GHz, and those of the D SAG capless p-HEMT were 1.12S/mm, 1.27×104, 78mV/dec, 185GHz and 225GHz. The QE SAG capless p-HEMT also exhibited a shorter drain delay time than the D SAG capless p-HEMT by about 46.
Original language | English |
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Pages (from-to) | 1178-1180 |
Number of pages | 3 |
Journal | Electronics Letters |
Volume | 42 |
Issue number | 20 |
DOIs | |
State | Published - 2006 |