Characteristics of 0.2m depletion and quasi-enhancement mode self-aligned gate capless p-HEMTs

T. W. Kim, D. H. Kim, S. H. Shin, S. J. Jo, J. H. Jang, J. I. Song

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1 Scopus citations

Abstract

Characteristics of 0.2m depletion mode (D) and quasi-enhancement mode (QE) capless InAlAs/InGaAs p-HEMTs having a self-aligned gate (SAG) are reported. The QE SAG capless p-HEMT showed improved output conductance and sub-threshold characteristics owing to the increased gate-to-channel aspect ratio implemented by using a buried Pt technology. The maximum gm, I ON/IOFF, sub-threshold slope, fT, and f max of the QE SAG capless p-HEMT were 1.22S/mm, 2.11×10 5, 65mV/dec, 210GHz and 250GHz, and those of the D SAG capless p-HEMT were 1.12S/mm, 1.27×104, 78mV/dec, 185GHz and 225GHz. The QE SAG capless p-HEMT also exhibited a shorter drain delay time than the D SAG capless p-HEMT by about 46.

Original languageEnglish
Pages (from-to)1178-1180
Number of pages3
JournalElectronics Letters
Volume42
Issue number20
DOIs
StatePublished - 2006

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