Characteristics of Conventional STI Process-Related Deep-Level Traps in Silicon
- In Man Kang
- , Hyuck In Kwon
- , Myung Won Lee
- , Byung Gook Park
- , Jong Duk Lee
- , Sang Sik Park
- , Jung Chak Ahn
- , Yong Hee Lee
- Seoul National University
- Sejong University
- Samsung
Research output: Contribution to journal › Article › peer-review
5
Scopus
citations