Abstract
The CF4 plasma treatment of indium-tin-oxide (ITO) greatly improves the performance of organic light-emitting diodes (OLEDs). The effects of plasma treatment on the chemical composition change and device performance were investigated by X-ray photoemission spectroscopy (XPS). The present results suggest that fluorine directly bonded to indium or tin on the ITO surface and markedly enhanced device performance.
Original language | English |
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Pages (from-to) | 6814-6816 |
Number of pages | 3 |
Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
Volume | 46 |
Issue number | 10 A |
DOIs | |
State | Published - 9 Oct 2007 |
Keywords
- Chemical composition
- Fluorine
- Organic light-emitting diodes
- Plasma treatment
- X-ray photoemlssion spectroscopy