Characterization of (Pb1-xLax)TiO3 Thin Films Grown by Radio -Frequency Magnetron Sputtering and Their Electrical Properties

Su Jin Chae; Sang Shik Park; Soon Gil Yoon

doi:10.1080/10584589508012264

Characterization of (Pb_1-xLa_x)TiO₃ Thin Films Grown by Radio -Frequency Magnetron Sputtering and Their Electrical Properties

Su Jin Chae, Sang Shik Park, Soon Gil Yoon

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13 Scopus citations

Abstract

Microstructure, composition, and electrical properties were investigated for polycrystalline (Pb,La)TiO₃(PLT) thin films deposited from the 10 and 20 mol% excess PbO targets. The compositional analysis by Rutherford backscattering pectroscopy shows that PLT films from 20 mol% excess PbO have almost stoichiometric composition and a dense structure. The dielectric constant and a dissipation factor of PLT films from 20 mol% excess PbO were 640 and 0.02 at 100 kHz, respectively. The conduction behavior of PLT films from 10 mol% excess PbO suggested a bulk-limited Poole-Frenkel emission in the high field region, while from 20 mol% excess PbO induced a electrode-limited Schottky emission.

Original language	English
Pages (from-to)	63-72
Number of pages	10
Journal	Integrated Ferroelectrics
Volume	10
Issue number	1-4
DOIs	https://doi.org/10.1080/10584589508012264
State	Published - 1 Oct 1995

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title = "Characterization of (Pb1-xLax)TiO3 Thin Films Grown by Radio -Frequency Magnetron Sputtering and Their Electrical Properties",

abstract = "Microstructure, composition, and electrical properties were investigated for polycrystalline (Pb,La)TiO3(PLT) thin films deposited from the 10 and 20 mol% excess PbO targets. The compositional analysis by Rutherford backscattering pectroscopy shows that PLT films from 20 mol% excess PbO have almost stoichiometric composition and a dense structure. The dielectric constant and a dissipation factor of PLT films from 20 mol% excess PbO were 640 and 0.02 at 100 kHz, respectively. The conduction behavior of PLT films from 10 mol% excess PbO suggested a bulk-limited Poole-Frenkel emission in the high field region, while from 20 mol% excess PbO induced a electrode-limited Schottky emission.",

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AU - Chae, Su Jin

AU - Park, Sang Shik

AU - Yoon, Soon Gil

PY - 1995/10/1

Y1 - 1995/10/1

N2 - Microstructure, composition, and electrical properties were investigated for polycrystalline (Pb,La)TiO3(PLT) thin films deposited from the 10 and 20 mol% excess PbO targets. The compositional analysis by Rutherford backscattering pectroscopy shows that PLT films from 20 mol% excess PbO have almost stoichiometric composition and a dense structure. The dielectric constant and a dissipation factor of PLT films from 20 mol% excess PbO were 640 and 0.02 at 100 kHz, respectively. The conduction behavior of PLT films from 10 mol% excess PbO suggested a bulk-limited Poole-Frenkel emission in the high field region, while from 20 mol% excess PbO induced a electrode-limited Schottky emission.

AB - Microstructure, composition, and electrical properties were investigated for polycrystalline (Pb,La)TiO3(PLT) thin films deposited from the 10 and 20 mol% excess PbO targets. The compositional analysis by Rutherford backscattering pectroscopy shows that PLT films from 20 mol% excess PbO have almost stoichiometric composition and a dense structure. The dielectric constant and a dissipation factor of PLT films from 20 mol% excess PbO were 640 and 0.02 at 100 kHz, respectively. The conduction behavior of PLT films from 10 mol% excess PbO suggested a bulk-limited Poole-Frenkel emission in the high field region, while from 20 mol% excess PbO induced a electrode-limited Schottky emission.

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Characterization of (Pb_1-xLa_x)TiO₃ Thin Films Grown by Radio -Frequency Magnetron Sputtering and Their Electrical Properties

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