TY - JOUR
T1 - Communication-corrosion behavior of tungsten metal gate in the presence of hydrogen peroxide at acidic medium
AU - Seo, Jihoon
AU - You, Keungtae
AU - Moon, Jinok
AU - Kim, Joo Hyun
AU - Paik, Ungyu
N1 - Publisher Copyright:
© 2017 The Electrochemical Society. [.
PY - 2017
Y1 - 2017
N2 - Herein, the corrosion behaviors of W metal gates in the presence of H2O2 at the acidic medium were investigated as a function of dipping time, temperature, and H2O2 concentration. We determined the kinetic constants (i.e. kw and kh) based on the experimental data. The activation energy (Ea) are calculated from the Arrhenius equation. Thermodynamic parameters (ΔG‡, ΔH‡, and ΔS‡) for the dissolution were determined based on the Eyring plot. These results investigated in this study will provide researchers the prior information on parameters to control the corrosion behaviors of W metal gates during the chemical mechanical planarization (CMP) process.
AB - Herein, the corrosion behaviors of W metal gates in the presence of H2O2 at the acidic medium were investigated as a function of dipping time, temperature, and H2O2 concentration. We determined the kinetic constants (i.e. kw and kh) based on the experimental data. The activation energy (Ea) are calculated from the Arrhenius equation. Thermodynamic parameters (ΔG‡, ΔH‡, and ΔS‡) for the dissolution were determined based on the Eyring plot. These results investigated in this study will provide researchers the prior information on parameters to control the corrosion behaviors of W metal gates during the chemical mechanical planarization (CMP) process.
UR - http://www.scopus.com/inward/record.url?scp=85029225619&partnerID=8YFLogxK
U2 - 10.1149/2.0311704jss
DO - 10.1149/2.0311704jss
M3 - Article
AN - SCOPUS:85029225619
SN - 2162-8769
VL - 6
SP - P169-P171
JO - ECS Journal of Solid State Science and Technology
JF - ECS Journal of Solid State Science and Technology
IS - 4
ER -