Abstract
This feature article provides an overview of several mechanical-based micro- and nanopatterning technologies that can achieve continuous and high-throughput fabrication of various sub-wavelength structures without resorting to the conventional optical lithography technique. These include a template-based and versatile roll-to-roll nanoimprint lithography technique, cost-effective dynamic mould sweeping patterning as well as mould-free patterning methods. Examples of demonstrated and potential applications in optoelectronics and photonics are also discussed.
Original language | English |
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Pages (from-to) | 7681-7691 |
Number of pages | 11 |
Journal | Journal of Materials Chemistry C |
Volume | 1 |
Issue number | 46 |
DOIs | |
State | Published - 14 Dec 2013 |