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Continuous photolithography by roll-type mask and applications
Moon Kyu Kwak
School of Mechanical Engineering
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Article
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peer-review
1
Scopus citations
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Dive into the research topics of 'Continuous photolithography by roll-type mask and applications'. Together they form a unique fingerprint.
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Engineering
Optical Lithography
100%
Lithography
50%
Phase Shift
50%
Photoresist
25%
Phase Mask
25%
Rotating Speed
25%
Nanolithography
25%
Material Science
Lithography
100%
Transparent Conducting Film
50%
Type Metal
50%
Film Type
50%