DC and RF Characteristics of Advanced MIM Capacitors for MMIC’s Using Ultra-Thin Remote-PECVD Si3N4Dielectric Layers

Jae Hak Lee, Dae Hyun Kim, Yong Soon Park, Myoung Kyu Sohn, Kwang Seok Seo

Research output: Contribution to journal › Article › peer-review

28 Scopus citations

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