Densely Packed Pie Shaped Vertical-Cavity Surface-Emitting Laser Array Incorporating a Tapered One-Dimensional Wet Oxidation

Young Gu Ju; Dan Lofgreen; Andrea Fiore; Syn Yem Hu; Eric Hegblom; Duane Louderback; Ola Sjolund; Andrew Huntington; Larry A. Coldren

doi:10.1109/68.841253

Densely Packed Pie Shaped Vertical-Cavity Surface-Emitting Laser Array Incorporating a Tapered One-Dimensional Wet Oxidation

Young Gu Ju, Dan Lofgreen, Andrea Fiore, Syn Yem Hu, Eric Hegblom, Duane Louderback, Ola Sjolund, Andrew Huntington, Larry A. Coldren

Department of Physics Education

University of California at Santa Barbara

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

Wavelength-division-multiplexing (WDM) photonic integrated emitter (PIE) vertical-cavity surface-emitting laser (VCSEL) arrays are fabricated using a post growth wet oxidation technique. High-density integration of WDM VCSEL arrays is possible by combining the technique of one-dimensional oxidation and large-scale tapered oxidation. Eight channels are integrated into a circle of 60 μm in diameter. Seven channels are found to operate as lasers. The lasing wavelengths range from 823 to 836 nm corresponding with the distance between the VCSEL mesa and the tuning trench. The successful demonstration of incorporating wet oxidation into the wavelength control of the PIE VCSEL array opens a new way of fabricating mask-defined densely packed WDM VCSEL arrays.

Original language	English
Pages (from-to)	462-464
Number of pages	3
Journal	IEEE Photonics Technology Letters
Volume	12
Issue number	5
DOIs	https://doi.org/10.1109/68.841253
State	Published - May 2000

Keywords

Laser arrays
Optical fiber communication
Optical fiber LAN
Optical transmitters
Oxidation
Semiconductor lasers
Surface-emitting lasers
Wavelength-division multiplex

Access to Document

10.1109/68.841253

Cite this

@article{e57e724a8c7845abbecf62a487633c46,

title = "Densely Packed Pie Shaped Vertical-Cavity Surface-Emitting Laser Array Incorporating a Tapered One-Dimensional Wet Oxidation",

abstract = "Wavelength-division-multiplexing (WDM) photonic integrated emitter (PIE) vertical-cavity surface-emitting laser (VCSEL) arrays are fabricated using a post growth wet oxidation technique. High-density integration of WDM VCSEL arrays is possible by combining the technique of one-dimensional oxidation and large-scale tapered oxidation. Eight channels are integrated into a circle of 60 μm in diameter. Seven channels are found to operate as lasers. The lasing wavelengths range from 823 to 836 nm corresponding with the distance between the VCSEL mesa and the tuning trench. The successful demonstration of incorporating wet oxidation into the wavelength control of the PIE VCSEL array opens a new way of fabricating mask-defined densely packed WDM VCSEL arrays.",

keywords = "Laser arrays, Optical fiber communication, Optical fiber LAN, Optical transmitters, Oxidation, Semiconductor lasers, Surface-emitting lasers, Wavelength-division multiplex",

author = "Ju, \{Young Gu\} and Dan Lofgreen and Andrea Fiore and Hu, \{Syn Yem\} and Eric Hegblom and Duane Louderback and Ola Sjolund and Andrew Huntington and Coldren, \{Larry A.\}",

year = "2000",

month = may,

doi = "10.1109/68.841253",

language = "English",

volume = "12",

pages = "462--464",

journal = "IEEE Photonics Technology Letters",

issn = "1041-1135",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "5",

}

TY - JOUR

T1 - Densely Packed Pie Shaped Vertical-Cavity Surface-Emitting Laser Array Incorporating a Tapered One-Dimensional Wet Oxidation

AU - Ju, Young Gu

AU - Lofgreen, Dan

AU - Fiore, Andrea

AU - Hu, Syn Yem

AU - Hegblom, Eric

AU - Louderback, Duane

AU - Sjolund, Ola

AU - Huntington, Andrew

AU - Coldren, Larry A.

PY - 2000/5

Y1 - 2000/5

N2 - Wavelength-division-multiplexing (WDM) photonic integrated emitter (PIE) vertical-cavity surface-emitting laser (VCSEL) arrays are fabricated using a post growth wet oxidation technique. High-density integration of WDM VCSEL arrays is possible by combining the technique of one-dimensional oxidation and large-scale tapered oxidation. Eight channels are integrated into a circle of 60 μm in diameter. Seven channels are found to operate as lasers. The lasing wavelengths range from 823 to 836 nm corresponding with the distance between the VCSEL mesa and the tuning trench. The successful demonstration of incorporating wet oxidation into the wavelength control of the PIE VCSEL array opens a new way of fabricating mask-defined densely packed WDM VCSEL arrays.

AB - Wavelength-division-multiplexing (WDM) photonic integrated emitter (PIE) vertical-cavity surface-emitting laser (VCSEL) arrays are fabricated using a post growth wet oxidation technique. High-density integration of WDM VCSEL arrays is possible by combining the technique of one-dimensional oxidation and large-scale tapered oxidation. Eight channels are integrated into a circle of 60 μm in diameter. Seven channels are found to operate as lasers. The lasing wavelengths range from 823 to 836 nm corresponding with the distance between the VCSEL mesa and the tuning trench. The successful demonstration of incorporating wet oxidation into the wavelength control of the PIE VCSEL array opens a new way of fabricating mask-defined densely packed WDM VCSEL arrays.

KW - Laser arrays

KW - Optical fiber communication

KW - Optical fiber LAN

KW - Optical transmitters

KW - Oxidation

KW - Semiconductor lasers

KW - Surface-emitting lasers

KW - Wavelength-division multiplex

UR - http://www.scopus.com/inward/record.url?scp=0001668321&partnerID=8YFLogxK

U2 - 10.1109/68.841253

DO - 10.1109/68.841253

M3 - Article

AN - SCOPUS:0001668321

SN - 1041-1135

VL - 12

SP - 462

EP - 464

JO - IEEE Photonics Technology Letters

JF - IEEE Photonics Technology Letters

IS - 5

ER -

Densely Packed Pie Shaped Vertical-Cavity Surface-Emitting Laser Array Incorporating a Tapered One-Dimensional Wet Oxidation

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this