Design and fabrication of a new travelling wave-type ultrasonic linear motor

Yongrae Roh, Susung Lee, Wooseok Han

Research output: Contribution to journalArticlepeer-review

44 Scopus citations

Abstract

This paper describes the development of a new travelling wave-type ultrasonic linear motor. The motor consists of a metallic stator and two piezoelectric ceramic plates bonded to the stator, thereby eliminating the need for external vibrators. The two piezoceramic plates excite two ultrasonic standing waves with a certain phase difference, which convert to a travelling wave when combined together. The operation principle of the motor is presented along with the theoretical equations, and the feasibility is verified using the finite element method. Based on the finite element analyses, detailed dimensions and boundary conditions are determined for the proper generation of a travelling wave. Experimental fabrication and characterization of a sample motor is performed to confirm the numerical results and prove the practical applicability of the new structure. The new linear motor presented in this work offers a relatively simple structure compared to traditional travelling wave-types while maintaining all the characteristic features of an ultrasonic motor.

Original languageEnglish
Article number3103
Pages (from-to)205-210
Number of pages6
JournalSensors and Actuators A: Physical
Volume94
Issue number3
DOIs
StatePublished - 2001

Keywords

  • Finite element analysis
  • Piezoceramic
  • Travelling wave-type
  • Ultrasonic linear motor

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