Design and fabrication of a PDMS/parylene microvalve for the treatment of hydrocephalus

Jonghyun Oh; Gyuman Kim; Francis Kralick; Hongseok Noh

doi:10.1109/JMEMS.2011.2148158

Design and fabrication of a PDMS/parylene microvalve for the treatment of hydrocephalus

Jonghyun Oh, Gyuman Kim, Francis Kralick, Hongseok Noh

School of Mechanical Engineering

Drexel University

Research output: Contribution to journal › Article › peer-review

35 Scopus citations

Abstract

We present a novel microvalve for the treatment of a pathological condition, i.e., hydrocephalus. This microvalve is made of polydimethylsiloxane/ Parylene composite layer which has a 3-D dome petal shape. This geometry enables the microvalve to rectify fluid flow in the forward and backward directions. New microfabrication techniques such as dome-shaped SU-8 mold fabrication and excimer laser machining for valve opening have been investigated to build the proposed microvalve. The pressure drop versus flow rate characteristics of the fabricated microvalve was investigated through in vitro flow tests. The flow test results showed that a 10 × 10 microvalve array with a cross-cut opening shape (200mu × 60mu was found to be optimal for the treatment of hydrocephalus.

Original language	English
Article number	5776634
Pages (from-to)	811-818
Number of pages	8
Journal	Journal of Microelectromechanical Systems
Volume	20
Issue number	4
DOIs	https://doi.org/10.1109/JMEMS.2011.2148158
State	Published - Aug 2011

Keywords

Excimer laser machining
hydrocephalus
implantable microdevice
microvalve
Parylene
polydimethylsiloxane (PDMS)

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10.1109/JMEMS.2011.2148158

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Design and fabrication of a PDMS/parylene microvalve for the treatment of hydrocephalus

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