@inproceedings{242094344cae4a8d82db62554423621e,
title = "Design and fabrication of an IC compatible on-chip thermoelectric cooler",
abstract = "The designing and fabrication of an on-chip integrated thin film-based thermoelectric cooler and the characterization of fabricated material are discussed. A thin film-based Peltier device was realized using the standard IC fabrication technology followed by bulk micromachining technology. electrochemically controlled etch (ECE) was performed to define thermal mass from 4μm-thick epi-layer, suspended underneath the SiN/SiO2 membrane. The thermal, electric and thermoelectric properties of the test structure were measured.",
author = "Kang, {Ik Su} and Kong, {Seong Ho}",
year = "2004",
language = "English",
isbn = "4990247205",
series = "Digest of Papers - Microprocesses and Nanotechnology 2004",
pages = "294--295",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2004",
note = "2004 International Microprocesses and Nanotechnology Conference ; Conference date: 26-10-2004 Through 29-10-2004",
}