TY - GEN
T1 - Design optimization of Scanning Resistive Microscopy (SRM) probe for spatial resolution improvement
AU - Ko, Hyoungsoo
AU - Hong, S.
AU - Park, H.
AU - Park, C.
AU - Jung, J.
AU - Min, D. K.
AU - Choa, S. H.
AU - Shin, H.
AU - Lee, H.
PY - 2006
Y1 - 2006
N2 - We suggest a new design of resistive probe (RP) for spatial resolution improvement by Si tip shape control. The major change of the new design is wedge-like probe formation rather than pyramidal shape, which results in the reduced removal of high doped volume near the slanting surface of probe. Therefore, we could reduce spatial resolution deterioration mainly due to low doped volume of the sloped surface. The newly designed resistive probe (RP) showed about 40 nm transition (which is assumed to be a distance taken signal rising from 10% to 90% of saturation level) in bit writing and reading experiment on the real ferroelectric media, which is a few times improvement compared to the original one.
AB - We suggest a new design of resistive probe (RP) for spatial resolution improvement by Si tip shape control. The major change of the new design is wedge-like probe formation rather than pyramidal shape, which results in the reduced removal of high doped volume near the slanting surface of probe. Therefore, we could reduce spatial resolution deterioration mainly due to low doped volume of the sloped surface. The newly designed resistive probe (RP) showed about 40 nm transition (which is assumed to be a distance taken signal rising from 10% to 90% of saturation level) in bit writing and reading experiment on the real ferroelectric media, which is a few times improvement compared to the original one.
UR - http://www.scopus.com/inward/record.url?scp=50149111360&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2007.355900
DO - 10.1109/ICSENS.2007.355900
M3 - Conference contribution
AN - SCOPUS:50149111360
SN - 1424403766
SN - 9781424403769
T3 - Proceedings of IEEE Sensors
SP - 1426
EP - 1427
BT - 2006 5th IEEE Conference on Sensors
T2 - 2006 5th IEEE Conference on Sensors
Y2 - 22 October 2006 through 25 October 2006
ER -