Detection of streptavidin-biotin protein complexes using a 3-dimensional MOSFET in the Si micro-fluidic channel

Dae Il Han, Dong Sun Kim, Jee Eun Park, Jang Kyoo Shin, Seong Ho Kong, Pyung Choi, Geunbae Lim

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The detection of streptavidin-biotin protein complexes using a p-channel 3D MOSFET-type biosensor was investigated. Micro-fluidic channel with a depth of 15μm and a width of 400μm was formed by using tetramethyl ammonium hydroxide (TMAH) anisotropic etching solution. A Au/Cr layer was used as the gate metal in order to form self-assembled monolayer (SAM) between Au and thiol. The movements of the resonant angle proved that SAM, streptavidin and biotin were combined on the Au surface.

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2004
Pages228-229
Number of pages2
StatePublished - 2004
Event2004 International Microprocesses and Nanotechnology Conference - Osaka, Japan
Duration: 26 Oct 200429 Oct 2004

Publication series

NameDigest of Papers - Microprocesses and Nanotechnology 2004

Conference

Conference2004 International Microprocesses and Nanotechnology Conference
Country/TerritoryJapan
CityOsaka
Period26/10/0429/10/04

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