Detection of streptavidin-biotin protein complexes using three-dimensional MOSFET in the Si micro-fluidic channel

To detect the electrical reaction characteristics of streptavidin-biotin protein complexes, a three-dimensional (3-D) p-channel metal oxide semiconductor field effect transistor (PMOSFET)-type biosensor was fabricated in the convex corner of a micro-fluidic channel by tetramethyl ammonium hydroxide (TMAH) anisotropic etching. Au, which has a chemical affinity with thiol, was used as the gate metal for immobilizing a self-assembled monolayer (SAM). The SAM was used to immobilize streptavidin. The hydroxyl group of SAM was bound with the amine group of streptavidin. After that, streptavidin and biotin were bound by their high affinity (Ka ∼ 10¹⁵ Mol^-1). The measurements were performed in phosphate-buffered saline (PBS; pH 6.4, 20 mM) solution. Ag/AgCl was used as the reference electrode. The bindings of SAM, streptavidin and biotin caused a variation in the drain current of the 3-D MOSFET. To verify the interaction among the SAM, streptavidin and biotin, surface plasmon resonance (SPR) measurement was performed.