Abstract
We developed a new standing wave type ultrasonic linear motor. The composite stator consists of a metallic plate and two piezoceramic plates bonded to the metallic plate with a spatial phase difference of a half wavelength. The operation principle of the motor was presented with theoretical equations and the feasibility was verified using the finite element method. Experimental fabrication and characterization of a sample motor was performed to confirm the validity of the new structure and the numerical results. The new motor offers identical performance in both forward and backward motions, while maintaining a simple structure and all the characteristic features of an ultrasonic linear motor.
| Original language | English |
|---|---|
| Pages (from-to) | 196-202 |
| Number of pages | 7 |
| Journal | Sensors and Actuators A: Physical |
| Volume | 112 |
| Issue number | 2-3 |
| DOIs | |
| State | Published - 1 May 2004 |
Keywords
- FEA
- Piezoceramic plate
- Standing wave
- Ultrasonic linear motor