Development of a new standing wave type ultrasonic linear motor

Yongrae Roh, Jaehwa Kwon, Susung Lee

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

This paper presents a new standing wave type linear motor that can move bi-directionally with identical performance in both the forward and backward directions. The motor consists of a metallic stator and two piezoceramic plates bonded to the stator with the spatial phase difference of a half wavelength. With two electric driving signals either in-phase or out-of-phase for the two piezoceramic plates, the piezoceramic plates excite two ultrasonic standing waves with a certain phase difference. They generate a new standing wave when combined. The operation principle of the motor is verified through finite element analyses. For an experimental illustration of the theoretical and numerical results, a sample motor is fabricated and characterized following the numerical design. The experimental results confirm the validity and practical applicability of the new motor structure.

Original languageEnglish
Pages (from-to)345-352
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4701
DOIs
StatePublished - 2002
EventSmart Structures and Materials 2002: Smart Structures and Integrated Systems - San Diego, CA, United States
Duration: 18 Mar 200221 Mar 2002

Keywords

  • Bi-directional
  • Piezoelectric ceramic
  • Standing wave
  • Ultrasonic motor

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