Abstract
Atomic force microscopy (AFM) is one of the frequently used microscopy techniques to capture high-resolution images in science and engineering. Since the spatial resolution limit of AFM has been mostly reached and no further improvement is likely, much of the recent attention in the development of new AFM has been on improvement of speed. We present a photo-thermal, high-speed atomic force microscope scan head capable of exciting cantilevers photo-thermally and detecting cantilever motions with an optical beam bounce technique. The design features a unique Z-collar that permits direct mounting of a Z-scanner onto a microscope objective lens to achieve a high mechanical bandwidth. We demonstrate the performance of the developed scan head by imaging data tracks of a Blu-ray disk in tapping and contact modes.
Original language | English |
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Article number | 047003 |
Journal | Measurement Science and Technology |
Volume | 31 |
Issue number | 4 |
DOIs | |
State | Published - 2020 |
Keywords
- finite element analysis
- high-speed atomic force microscopy
- optical beam deflection