@inproceedings{52e3f7ad4ca74b9e9a9ec3c744530e45,
title = "Development of a planar 3-DOF nano-positioning stage for compensation of the geometric error in a linear axis",
abstract = "This paper presents a three degrees of freedom (3-DOF) nano-positioning stage in the plane. In order to apply machining, the stage composes of a parallel kinematic mechanism (PKM) structure with the flexure hinges driven by three piezo-electric actuators to achieve the translations in the X- and Y-axes and rotation in the Z-axis. The design of the stage aims at structural stiffness improvement and miniaturization of the size. The static and dynamic stiffness analysis results are presented to verify the validity of three-DOF motion. The proposed nano-positioning stage has a translational motion of 20 nm and rotational motion of 0.2 arcsec in X-, Y-, and θ-directional motion. Experimental testing has been evaluated to the compensation performance of the developed stage respecting the error of a linear axis. The linear displacement error, horizontal straightness error and yaw error is reduced by 90.8%, 96.5% and 90% respectively.",
keywords = "Flexure hinge, Nano-positioning stage, Parallel mechanism, Piezo-electric actuator",
author = "Lee, {Jae Chang} and Lee, {Min Jae} and Yang, {Seung Han}",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 13th International Conference on Ubiquitous Robots and Ambient Intelligence, URAI 2016 ; Conference date: 19-08-2016 Through 22-08-2016",
year = "2016",
month = oct,
day = "21",
doi = "10.1109/URAI.2016.7734054",
language = "English",
series = "2016 13th International Conference on Ubiquitous Robots and Ambient Intelligence, URAI 2016",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "331--335",
booktitle = "2016 13th International Conference on Ubiquitous Robots and Ambient Intelligence, URAI 2016",
address = "United States",
}