Development of novel two-DOF nano-positioning stage with high thermal stiffness

Jae Chang Lee, Hoon Hee Lee, Seung Han Yang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageEnglish
Title of host publicationProceedings - 32nd ASPE Annual Meeting
PublisherAmerican Society for Precision Engineering, ASPE
Pages387-392
Number of pages6
ISBN (Electronic)9781887706742
StatePublished - 2016
Event32nd Annual Meeting of the American Society for Precision Engineering, ASPE 2017 - Chartlotte, United States
Duration: 29 Oct 20173 Nov 2017

Publication series

NameProceedings - 32nd ASPE Annual Meeting

Conference

Conference32nd Annual Meeting of the American Society for Precision Engineering, ASPE 2017
Country/TerritoryUnited States
CityChartlotte
Period29/10/173/11/17

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