@inproceedings{4e20488ce6f9473dbe4147d207007171,
title = "Development of novel two-DOF nano-positioning stage with high thermal stiffness",
author = "Lee, {Jae Chang} and Lee, {Hoon Hee} and Yang, {Seung Han}",
year = "2016",
language = "English",
series = "Proceedings - 32nd ASPE Annual Meeting",
publisher = "American Society for Precision Engineering, ASPE",
pages = "387--392",
booktitle = "Proceedings - 32nd ASPE Annual Meeting",
note = "32nd Annual Meeting of the American Society for Precision Engineering, ASPE 2017 ; Conference date: 29-10-2017 Through 03-11-2017",
}